Skip to main content Accessibility help
×
Home

Laser-Initiated Ga-Deposition on Quartz Substrates

  • Y. Rytz-Froidevaux (a1), R.P. Salathe (a1) and H.H. Gilgen (a1)

Abstract

The deposition of Ga on quartz substrates by photodissociation of trimethylgallium has been investigated. Light from a frequency doubled Ar-ion laser beam (257.2 nm) was focused onto quartz substrates. The Ar-ion laser was operated under cw or mode-locking conditions. The deposition rate has been investigated as a function of averaged UV power densities in the range of 1.8 – 1750 w/cm2 and is shown to depend critically on the laser operating mode. For cw operation, the maximum growth rate within the focal zone is limited to 17 Å/s whereas under mode-locking conditions, no saturation is observed and the growth rate increases linearly with the laser power up to 70 Å/s at 1.75 kW/cm2.

Copyright

References

Hide All
[1] Christensen, C.P. and Lakin, K.M., Appl. Phys. Lett. 32, 254 (1978)
[2] von Gutfeld, R.J., Tynan, E.E., and Romankiw, L.T., extended abstract n° 472, Electrochem. Soc. 79 (2) (1979)
[3] Ehrlich, D.J., Osgood, R.M. Jr., and Deutsch, T.F., Appl. Phys. Lett. 36, 698 (1980)
[4] Andreatta, R.W., Abele, C.C., Osmundsen, J.F., Eden, J.G., Lubben, D., and Greene, J.E., Appl. Phys. Lett. 40, 183 (1982)
[5] Deutsch, T.F., Ehrlich, D.J., and Osgood, R.M. Jr., Appl. Phys. Lett. 35, 175 (1979)
[6] Solanki, R., Boyer, P.M., Mahan, J.E., and Collins, G.J., Appl. Phys. Lett. 38, 572 (1981)
[7] Ehrlich, D.J., Osgood, R.M. Jr. and Deutsch, T.F, J. Electrochem. Soc. 128, 2039 (1981)
[8] Rytz-Froidevaux, Y., Salathe, R.P., Gilgen, H.H., and Weber, H.P., Appl. Phys. A27, 133 (1982)
[9] Steacie, E.W.R., Atomic and free radical reactions (Reinhold Publishing Corporation, New York 1956)
[10] Boernstein, Landolt Vol.IV,part 4b, Wsermetechnik (Springer Verlag, Berlin 1972) p. 482
[11] Solanki, J.R., Boyer, P.K., Mahan, J.E., and Collins, G.J., Appl. Phys. Lett. 38, 572 (1981)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed