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Laser-Chemical 3-D Micromachining

Published online by Cambridge University Press:  22 February 2011

T. M. Bloomstein  and
D. J. Ehrlich
T. M. Bloomstein
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173–9108
D. J. Ehrlich
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173–9108
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Abstract

Three-dimensional parts are machined in silicon using laser-induced chlorine etching reactions. Structures are created directly from solid-modeling computer-aided-design/computer-aided-manufacturing software. Removal rates exceeding 2×104 and 105μm3/s, several orders of magnitude faster than electrodischarge machining methods, are achieved at 1-μm, and 15-μm x-y resolution, respectively. Laser-induced metallization of resulting structures as well as replication through compression molding have been demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 282: Symposium E – Chemical Perspectives of Microelectronic Materials III , 1992 , 165
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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