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Laser-Assisted Etching of Lithium Niobate

  • Glennis J. Orloff (a1), Steven L. Bernasek (a1), Gary L. Wolk (a2) and R. J. Coyle (a2)

Abstract

Laser-assisted dry etching of lithium niobate, LiNbO3, as well as other electro-optic materials could be an industrially important process in the fabrication of optical waveguides. In this investigation, an excimer laser (ArF; 193nm) was used to conduct etching reactions using nitrogen trifluoride, NF3. Enhancement of etching was observed by comparing the etch rate for a gas assisted process with that of a purely photoablative process. Chemical analysis of the etched features via Auger electron spectroscopy and correlation of a simple rate equation with the experimental data revealed that lasersurface interactions are responsible for the laser-assisted etching process.

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1. Chapman, R.E., Vacuum, 34, 417 (1984).
2. Zhang, B., Forouhar, S., Huang, S.Y., and Chang, W.S.C., J. Lightwave Tech., 2, 528 (1984).
3. Eyett, M. and Bauerle, D., Appl. Phys. A., 40, 235 (1986).
4. Ashby, C.I.H. and Brannon, P.J., Appl. Phys. Lett., 49, 475 (1986).
5. Eyett, M. and Bauerle, D., Appl. Phys. Lett., 51 2054 (1987).
6. Woytek, A.J., Lileck, J.T., and Barkanic, J.A., Solid State Tech., 1984, 172 (1984).
7. Golja, B., Barkanic, J.A., and Hoff, A., Microelectronics J., 16, 5 (1985).
8. Loper, G.L. and Tabat, M.D., App. Phys. Lett., 46, 654 (1985).
9. Hirose, M., Yokoyama, S., and Yamakage, Y., J. Vac. Sci. Tech. B., 3, 1445 (1985).
10. Yokoyama, S., Yamakage, Y., and Hirose, M., Appl. Phys. Lett., 47, 389 (1985).
11. Osgood, R.M. and Deutsch, T.F., Science, 227, 709 (1985).
12. Chuang, T.J., J. Vac. Sci. Tech., 21, 798 (1982).
13. Houle, F.A., Appl. Phys. A., 41, 315 (1986).
14. Ashby, C.I.H., Appl. Phys. Lett., 45, 892 (1984).
15. Ehrlich, D.J., Osgood, R.M. Jr., and Deutsch, T.F., Appl. Phys. Lett., 36, 698 (1980).
16. Glass, A.M., Peterson, G.E., and Negran, T.J. in An Introduction to Electrooptic Devices, edited by Kaminow, I.P. (Academic Press, New York, 1974) pp. 324343.

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Laser-Assisted Etching of Lithium Niobate

  • Glennis J. Orloff (a1), Steven L. Bernasek (a1), Gary L. Wolk (a2) and R. J. Coyle (a2)

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