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Laser Induced Deposition of YBa2Cu3O7−x Thin Films

  • H. S. Kwok (a1), P. Mattocks (a1), D. T. Shaw (a1), L. Shi (a1), X. W. Wang (a1), S. Witanachchi (a1), Q. Y. Ying (a1), J. P. Zheng (a1) and P. Bush (a1)...

Abstract

We describe here the deposition of the YBaCuO superconducting thin films by the laser evaporation technique. The characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discus sed.

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1. Wu, X.D., Dijkkamp, D., Ogale, S.B., Inam, A., Chase, E.W., Miceli, P.F., Chang, C.C., Tarascón, J.M. and Venkatesan, T., Appl. Phys. Lett. 51, 861 (1987).
2. Cheung, J.T., Niizawa, G., Moyle, J., Ong, N.P., Paine, B.M. and Vreeland, T., J. Vac. Sci. Tech. A4, 2086 (1986).
3. Sankur, H., in Laser Controlled Chemi-cal Chemical Processing of Surfaces, ed. by Johnson, A.W., Ehrlich, D.J. and Schlossberg, H.R., Mat. Res. Soc. Proc. vol. 29, p. 373, North Holland 1984.
4. Kwok, H.S., Mattocks, P., Shaw, D.T., Shi, L., Wang, X.W., Witanachchi, S., Ying, Q.Y. and Zheng, J.P., MRS Proceeding, 1987, to be published.
5. Ying, Q.Y. and Kwok, H.S., in BBeam-Solid Interaction and Transient Processes, ed. Thompson, M.O., Picraux, S.J., Thompson, M.O., Picraux, S.J. and Williams, J.S., Mat. Res. Soc. Proc. vol. 74, pp. 179183, 1987 (Pittsburgh, PA).

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