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Laser Induced Chemical Etching of Composite Structure of Ferrite and Sendust

  • S. Nagatomo (a1), M. Takai (a2), Y. F. Lu (a2) and S. Namba (a2)

Abstract

Maskless etching of the composite structure of Mn-Zn ferrite and sendust (Fe-Si-Al alloy) was performed by focused argon-ion-laser irradiation in a CCl4 atmosphere and aqueous solutions. Only a mixture of KOH and NaOH aqueous solutions was found to smoothly etch the composite structure by thermochemical reaction using laser irradiation. A maximum etching rate of 14 μm/sec was obtained for sendust-on-ferrite substrates.

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