Article contents
Laser Deposition of Molybdenum Oxide Thin Films From Organometallic Precursors
Published online by Cambridge University Press: 21 February 2011
Abstract
Thin films of crystalline molybdenum oxides were formed on silicon surfaces by laser deposition. An ArF excimer laser was used to photodissociate molybdenum hexacarbonyl in an oxygen-containing ambient. Normal incidence of the laser led to the formation of very thin (< 1000 Å) films of crystalline MO4O11. The films were characterized by color, SEM, Raman spectroscopy, and X-ray diffraction.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1990
References
- 4
- Cited by