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Laser Deposition and Patterning of High-Temperature Superconductors

  • D. BÅuerle (a1), J. Heitz (a1), W. Ludorf (a1), P. Schwab (a1) and X.Z. Wang (a1)...

Abstract

Superconducting films of Y-Ba-Cu-O and Bi-Sr-Ca-Cu-O on (100) SrTiO3 and (100) MgO substrates have been fabricated by reactive excimer-laser sputtering from ceramic targets. Film patterning by laser-induced reduction/metallization, oxidation, and ablation has been investigated.

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1. Bäuerle, D., Appl. Phys. A 48, 527 (1989).
2. Ludorf, W., Wang, X.Z., and Bäuerle, D., Appl. Phys. A 49, 221 (1989).
3. Liberts, G., Eyett, M., and Bfuerle, D., Appl. Phys. A 45, 313 (1988).
4. Liberts, G., Eyett, M. and Bäuerle, D., Appl. Phys. A 46, 331 (1988).
5. Eyett, M. and Bäuerle, D., Appl. Phys. Lett. 51, 2054 (1987).
6. Bäuerle, D., Eyett, M., Kolzer, U., Kullmer, R., Mogyorosi, P., and Piglmayer, K., in Laser- and Particle-Beam Chemical Processing for Microelectronics, eds. Ehrlich, D.J., Higashi, G.S., Oprysko, M.M. (Materials Research Society 1988 Symposium Proceedings, Vol. 101) p. 411.

Laser Deposition and Patterning of High-Temperature Superconductors

  • D. BÅuerle (a1), J. Heitz (a1), W. Ludorf (a1), P. Schwab (a1) and X.Z. Wang (a1)...

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