Skip to main content Accessibility help
×
Home

Laser Ablation Deposition of Diamond-Like Carbon Films

  • S. Leppävuori (a1), J. Levoska (a1), J. Vaara (a1) and O. Kusmartseva (a1)

Abstract

Diamond-like carbon (DLC) thin films were prepared by laser ablation deposition. The deposition process was carried out in a vacuum chamber at a base pressure of about 10−5 mbar using the focused beam from either an Nd:YAG laser or an XeCl excimer laser and a pyrolytic graphite target. The peak power density of the laser beam was about 108 W/cm2, and 1010 W/cm2. respectively. The effect of varying power density of the laser beam also was examined. The films were deposited on fused silica and silicon single crystal substrates between room temperature and 600 °C with and without hydrogen addition. The properties of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), micro-Raman and Fourier transform infrared (FTIR) spectrometry, electrical conductivity and optical measurements. The best films were insulating (σ<10−6 Ω−1 cm−1), hard, partly transparent (optical gap 1.3 − 2.2 eV) and smooth without any particulates on the surface.

Copyright

References

Hide All
1. Angus, J. and Hayman, C., Science 241, 913 (1988).
2. Knight, D. and White, W., J. Mater. Res. 4, 385 (1989).
3. Sato, T., Furano, S., Iguchi, S. and Hanabusa, M., Jpn. J. Appl. Phys. 26, L1487 (1987).
4. Davanloo, F., Juengerman, E.M., Jander, D.R., Lee, T.J. and Collins, C.B., J. Mater. Res. 5, 2398 (1990).
5. Pappas, D., Saenger, K., Bruley, J., Krakow, W., Cuomo, J., Gu, T. and Collins, R., J. Appl. Phys. 71, 5675 (1992).
6. Lespade, P., Al-Jishi, R. and Dresselhaus, M., Carbon 20, 427 (1982).
7. Yoshikawa, M., Katagiri, G., Ishida, H. and Ishitani, A., Solid State Commun. 66, 1177 (1988).

Related content

Powered by UNSILO

Laser Ablation Deposition of Diamond-Like Carbon Films

  • S. Leppävuori (a1), J. Levoska (a1), J. Vaara (a1) and O. Kusmartseva (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.