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Kinetics of Reactions Relevant to the Chemical Vapor Deposition of Indium Compounds

  • M. D. Allendorf (a1) and A. H. McDaniel (a1)

Abstract

The kinetics of trimethylindium pyrolysis are investigated in a flow reactor equipped with a molecular-beam mass-spectrometric sampling system. Data are analyzed using a new computational approach that accounts for heat and mass transport in the reactor. The measured activation energy, 46.2 kcal mol−1, is in good agreement with previously reported values.

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