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Kinetics of Reactions Relevant to the Chemical Vapor Deposition of Indium Compounds

Published online by Cambridge University Press:  10 February 2011

M. D. Allendorf  and
A. H. McDaniel
M. D. Allendorf
Affiliation:
Sandia National Laboratories, Livermore, CA 94551–0969, mdallen@sandia.gov
A. H. McDaniel
Affiliation:
Sandia National Laboratories, Livermore, CA 94551–0969, mdallen@sandia.gov
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Abstract

The kinetics of trimethylindium pyrolysis are investigated in a flow reactor equipped with a molecular-beam mass-spectrometric sampling system. Data are analyzed using a new computational approach that accounts for heat and mass transport in the reactor. The measured activation energy, 46.2 kcal mol−1, is in good agreement with previously reported values.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 495: Symposium W – Chemical Aspects of Electronic Ceramics Processing , 1997 , 125
Copyright
Copyright © Materials Research Society 1998

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References

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