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Kinetics of Rapid Thermal Oxidation : Critical Analysis of Experimental Results
Published online by Cambridge University Press: 25 February 2011
Abstract
In this paper, we present experimental kinetics data from the literature, and the large discrepancies between them is discussed. An analytical equation for oxide thickness vs. oxidation time and temperature, adequatly describing thin film growth, is used to estimate the temperature error likely to explain the discrepancy between the above data. We also assess this error by considering the temperature sensors.
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- Copyright © Materials Research Society 1989
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