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Iron Redistribution in Aluminum Thin Films

  • David L. Barr (a1), G.J. Gualtieri (a1), C.B. Case (a1), M.A. Marcus (a1) and W.L. Brown (a1)...

Abstract

Strongly non uniform Fe depth distributions have been observed in AI(0.13 at% Fe) thin films deposited at temperatures of 350ºC and above. The concentration of Fe is uniform in depth at a deposition temperature of 300ºC but is increasingly enhanced toward the substrate interface at 450ºC. Subsequent annealing produces only a slight redistribution of Fe. The Fe is primarily present as precipitates smaller than 100 nm. A model of grain boundary diffusion of Fe and precipitate formation and grain growth is proposed to explain the observed behavior.

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1. Freire, F.L., Silveira, E.F. da, Teixeira, S.R., Dionisio, P.H., Schreiner, W.H., and Baumvol, I.J.R., in NATO Advanced Science Institute on “Nuclear Physics Application on Materialws Science”, edited by Rucknagel, E. and Soares, J.C. (Kluwers Academic, Boston, MA, 1988) pp. 397400.
2. Levi-Setti, R., Fox, T.R., and Lam, K., Nucl. Instr. and Meth. 205, 299 (1983).
3. Barr, D.L., Harriott, L.R., and Brown, W.L., J. Vac. Sci. Technol. B 10, 6 (1992).

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Iron Redistribution in Aluminum Thin Films

  • David L. Barr (a1), G.J. Gualtieri (a1), C.B. Case (a1), M.A. Marcus (a1) and W.L. Brown (a1)...

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