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Ir Electrodes for Ferroelectric Capacitors

  • Sung Won Jung (a1), Ilhwan Bang (a1), Jaegab Lee (a1) and Jiyoung Kim (a1)

Abstract

In this study, Ir/IrO2 mixture electrodes are fabricated by furnace oxidation of sputter deposited Ir, IrO2 and their hybrid electrodes. The characteristics of furnace oxidation of various electrode stems with Ir family and their limitation are investigated. Annealing at higher than 700°C oxidation results in formation of undesirable extrusions in Ir electrode. When the Ir oxide facet extrusions are formed, Ir near at the extrusion is used up and SiO2 substrate are exposed. In addition, furnace oxidized Ir/Ti electrode is suggested as an alternative electrode, which shows smooth surface, good thermal stability, high oxygen contents and low resistivity.

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1. Oaz de Araujo, C.A., Cuchiaro, D., McMillan, L., Scott, M. and Scott, J., Nature, 374, 627 (1995)
2. Moazzami, R., Maniar, P., Jones, R., and Mogab, C. J., VLSI Tech. Symp. Dig., p. 55 (1994)
3. Jiang, B., Balu, V., Chen, T., Kuah, S., Lee, J., Chu, P., Jones, R., Zurcher, P., Taylor, D., Kottke, M., Gillespie, J., 1996 Symp. on VLSI Tech. Digest, p. 26 (1996)
4. Nakamura, T., Nakao, Y., Kamisawa, A. and Takasu, H., Appl. Phys. Lett., 65 (12), p.1522 (1994)
5. Eom, C., Van Dover, R., Phillips, J., Werder, D., Marshall, J., Chen, C., Cava, R., Fleming, R. and Folk, D., Appl. Phys. Lett., 63 (180),, 2570 (1993)
6. Lee, J., Ramesh, R., Dutta, B., Ravi, T., Sand, T., and Keramidas, V., Integrated Ferroelectrics, 5, p. 145,(1994)
7. Raymond, M., Al-Shareef, H., Tuttle, B., Dimos, D. and Evans, J., Mat. Res. Soc. Symp. Proc. Vol. 433, p. 145 (1996)
8. Balu, V., Chen, T., Jiang, B., Kuah, S., Lee, J., Chu, P., Jones, R., Zurcher, P., Taylor, D. and Gillespie, S., Mat. Res. Soc. Symp. Proc. Vol. 433, p. 139 (1996)

Ir Electrodes for Ferroelectric Capacitors

  • Sung Won Jung (a1), Ilhwan Bang (a1), Jaegab Lee (a1) and Jiyoung Kim (a1)

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