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Ion-beam Assisted Deposition of MgO with in situ RHEED Monitoring to Control Bi-axial Texture

  • James R. Groves (a1), Paul N. Arendt (a1), Stephen R Foltyn (a1), Quanxi Jia (a1), Raymond F. DePaula (a1), Paul C. Dowden (a1), Harriet Kung (a1), Terry G. Holesinger (a1), Liliana Stan (a1), Luke A. Emmert (a1) and Eric J. Peterson (a1)...

Abstract

We have studied the growth of magnesium oxide using ion-beam assisted deposition (IBAD) to achieve (100) oriented, bi-axially textured films with low mosaic spread, for film thicknesses of 10 nm on silicon substrates. We have refined the process by using reflected high-energy electron diffraction (RHEED) to monitor the growth of IBAD MgO films and found that the diffracted intensity can be used to determine (and ultimately control) final in-plane texture of the film. Here we present results on our work to develop the use of real-time RHEED monitoring to deposit well-oriented IBAD MgO films. The results have been corroborated with extensive grazing-incidence X-ray diffraction (GID). Results of these analyses have allowed us to deposit films on metallic substrates with in-plane mosaic spread less than 7°.

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