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Ion-assisted Laser Deposition of CaF2 thin Films onto Ccold Substrates

  • N. S. Gluck (a1), H. Sankur (a1) and W. J. Gunning (a1)

Abstract

Thin CaF2 films were grown at low temperatures (20°C) using an ion-beamassisted laser evaporation method. Smooth, dense, environmentally stable coatings with bulk refractive indices were produced. This technique was applied to deposit mid-wave IR dichroic filters using CaF2 and Ge layers onto cold substrates.

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1. Gibson, U.J. and Kennemore, C.M. III, Thin Solid Films, 124, 27, (1985).
2. Targove, J.D., Messerly, M.J., Lehan, J.P., Weng, C.C., Potoff, R.H., and Macleod, H.A., Proc. SPIE, 678, 115 (1986).
3. Sankur, H. and Gunning, W., “Deposition of Optical Thin Films by Pulsed Laser-Assisted Evaporation,” presented at the OSA Topical Meeting on Optical Interference Coatings in Tucson, AZ, April 12–15, 1988. To be published in the special issue of Applied Optics on Optical Interference Coatings.
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5. Sankur, H. and Cheung, J.T., J. Vac. Sci. Technol. 1A, 1806 (1983).
6. Sankur, H. and Southwell, W.H., Appl. Opt. 23, 2770 (1984).

Ion-assisted Laser Deposition of CaF2 thin Films onto Ccold Substrates

  • N. S. Gluck (a1), H. Sankur (a1) and W. J. Gunning (a1)

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