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Ion Projection Direct-Structuring For Nanotechnology Applications

  • Hans Loeschner (a1), Ernest J. Fantner (a1), Regina Korntner (a1), Elmar Platzgummer (a1), Gerhard Stengl (a1), Michaela Zeininger (a1), J. E. E. Baglin (a2), Ruediger Berger (a3), Wilhelm H. Brünger (a4), Andreas Dietzel (a3), Marie-Isabelle Baraton (a5) (a6) and Lhadi Merhari (a6)...

Abstract

Large-field ion-optics has been developed for reduction printing. Sub-100nm ion projection direct-structuring (IPDS) of patterned magnetic media discs has been demonstrated, extending over 17mm diameter exposure fields, in a single exposure. First results of IPDS patterning of nanocomposite resist material are presented. Information about a novel 200x reduction projection focused ion multi-beam (PROFIB) tool development is provided. Further IPDS nanotechnology applications are discussed.

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Ion Projection Direct-Structuring For Nanotechnology Applications

  • Hans Loeschner (a1), Ernest J. Fantner (a1), Regina Korntner (a1), Elmar Platzgummer (a1), Gerhard Stengl (a1), Michaela Zeininger (a1), J. E. E. Baglin (a2), Ruediger Berger (a3), Wilhelm H. Brünger (a4), Andreas Dietzel (a3), Marie-Isabelle Baraton (a5) (a6) and Lhadi Merhari (a6)...

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