Hostname: page-component-7bb8b95d7b-5mhkq Total loading time: 0 Render date: 2024-09-18T19:19:03.943Z Has data issue: false hasContentIssue false
  • English
  • Français

Ion Induced Damage and their Annealing in LiTaO3 Single Crystal

Published online by Cambridge University Press:  21 February 2011

Z Zhang ,
I.A. Rusakova  and
W.K. Chu
Z Zhang
Affiliation:
Texas Center for Superconductivity and Department of Physics, University of Houston, Houston, TX 77204–5932
I.A. Rusakova
Affiliation:
Texas Center for Superconductivity and Department of Physics, University of Houston, Houston, TX 77204–5932
W.K. Chu
Affiliation:
Texas Center for Superconductivity and Department of Physics, University of Houston, Houston, TX 77204–5932
Get access

Abstract

LiTaO3 single crystals have been implanted with 100 keV oxygen ions at room temperature with doses of 1×1014 /cm2,6xl014/cm2,1.2x1015/cm2, 6xl015/cm2, and 2xl016/cm2. Annealing temperatures ranged from 550 °C to 1075 °C. RBS-channeling and TEM were used for characterization. For partially damaged samples, complete recovery of the crystalline structure was achieved after annealing at 550 °C, which is below the Curie temperature. For totally amorphized samples, thermal annealing induced multidomain growth. These domains extend beyond the original amorphous/crystal interface deep into bulk (1 – 1.5 μm ).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 396: Symposium A – Ion-Solid Interactions for Materials Modification and Processing , 1995 , 273
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Townsend, P.D., Nucl. Instr. and Methods, B 89, p. 270 (1994).Google Scholar
2 Chandler, P.J. and Townsend, P.D., Nucl. Instr. and Methods, B 80/81. p. 1135 (1993).Google Scholar
3 Thyler, L., Lightwave, J., Technol., 6, p.847 (1988).Google Scholar
4 Tangonan, G.L., Bamoski, M.K., Lotspeich, J.F., and Lea, A., Appl. Phys. Letters, 30, p.238 (1977).Google Scholar
5 Findarkly, T., Farina, J., Svchoski, P., and Leonberger, F., in Technical Digest of 10 th Topical Meeting on Integrated and Guided-wave Optics, (Optical Society of American, Washington, DC, 1989), Paper WCC2.Google Scholar
6 Norkus, V., Hofmann, G., Mohlong, S., Budzier, H., Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1685. p. 155 (1992).Google Scholar
7 Yukara, A., Mizutani, T., Hosaka, N., Yanada, J., Kobayashi, S., IEEE 1989 Ultrasonics Symposium Proceedings, Vol. 1. p.343 (1989)Google Scholar
8 Ziegler, J.F., Biearsack, J.P., and Littmark, U.L., The Stopping and Range of Ions in Solids, Pergamon Press, New York, 1985.Google Scholar