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Ion Beam Modification of Ceramics *

  • C. J. Mchargue (a1), C. W. White (a1), B. R. Appleton (a1), G. C. Farlow (a1) and J. M. Williams (a1)...

Abstract

Alterations to the structure and properties of ceramics are complex due to the range of bonding types encountered and the necessity for maintaining local charge balance. Ion damage can occur as a result of ionizing effects as well as displacement collisions. Ion species, implantation temperature, implantation energy, and the specific bonding characteristics of the host are important parameters in determining the structure and properties of implanted ceramics. Some of these effects will be illustrated for Al2O3 implanted with chromium or zirconium and silicon carbide implanted with chromium.

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Research sponsored by the Division of Materials Sciences, U.S. Department of Energy, under contract W–7405–eng–26 with Union Carbide Corporation.

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Ion Beam Modification of Ceramics *

  • C. J. Mchargue (a1), C. W. White (a1), B. R. Appleton (a1), G. C. Farlow (a1) and J. M. Williams (a1)...

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