Skip to main content Accessibility help
×
Home

Ion Beam Irradiation of Metal Films on SiO2

  • G. J. Clark (a1), J. E. E. Baglin (a1), F. M. d'Heurle (a1), C. W. White (a2), G. Farlow (a2) and J. Narayan (a2)...

Abstract

Ion beam irradiation of metal film/SiO2 interfaces causes reactions when the metals are those chemically capable of reducing SiO2. These reactions result in the formation of metal rich silicides in the region of the interface and an increase in the adhesion of the film to the substrate. For other nonreactive metals ion irradiation causes lateral transport of metal atoms resulting in the formation of an island structure. The results obtained by ion irradiation are compared with previous studies of high temperature thermal processing of metal films on SiO2.

Copyright

References

Hide All
1. Pretorius, R., Harris, J. M. and Nicolet, M. A., Solid State Electronics 24, 667 (1978).
2. Kräutle, H., Chu, W. K., Nicolet, M. A., Mayer, J. W. and Tu, K. N., p. 193 in Applications of Ion Beams to Metals, ed. by Picraux, S. T., EerNisse, E. P. and Vook, F. L., Plenum Press, New York, 1974.
3. Kräutle, H., Nicolet, M. A. and Mayer, J. W., J. Appl. Phys. 45, 3304 (1974).
4. Tu, K. N., Ziegler, J. F. and Kircher, C. J., Appl. Phys. Lett. 23, 493 (1973.
5. Kräutle, H., Nicolet, M. A. and Mayer, J. W., Phys. Stat. Sol. 20, K33 (1973).
6.See for example, Tsaur, B. Y., Lau, S. S. and Hung, L. S., Nucl. Inst. Meth. 182/183, 1 (1981), and references contained therein.
7. Nagasawa, E., Morimoto, M. and Okabayashi, H. in “1982 Symposium on VLSI Technology, Digest of Technical Papers,” (Business Center for Academic Societies of Japan, Tokyo, 1982) p. 26.
8. Banwell, T., Liu, B. X., Golecki, I. and Nicolet, M. A., Nucl. Inst. Meth. 209/210, 125 (1983).
9. d'Heurle, F., Petersson, C. S. and Tsai, M. Y., J. Appl. Phys. 53, 8765 (1982).

Ion Beam Irradiation of Metal Films on SiO2

  • G. J. Clark (a1), J. E. E. Baglin (a1), F. M. d'Heurle (a1), C. W. White (a2), G. Farlow (a2) and J. Narayan (a2)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed