Skip to main content Accessibility help
×
Home

Investigation of Pt Bottom Electrodes for "In-Situ" Deposited Pb(Zr,Ti)O3 (PZT) thin Films

  • Rainer Bruchhaus (a1), Dana Pitzer (a1), Oliver Eibl (a1), Uwe Scheithauer (a1) and Wolfgang Hoesler (a1)...

Abstract

The deposition of the bottom electrode plays a key role in the fabrication of ferroelectric capacitors. Processing at elevated temperatures of up to 800°C can give rise to diffusion processes and thereof formation of harmful dielectric layers.

In this paper we used Rutherford backscattering spectrometry (RBS), Auger electron spectrometry (AES) and transmission electron microscopy (TEM) to study Pt/Ti/SiO2/Si substrates with various thicknesses of the Ti and Pt layers. During heating up to about 450°C in vacuum the initial layer sequence remains unchanged. However, drastic changes occur when the electrodes are exposed to Ar/O2 atmosphere during heat treatment. Oxidation induced diffusion of Ti into Pt and oxidation of Ti were observed. A Pt electrode with a 100 nm thick Ti adhesion layer proved to be suitable for the "in-situ" deposition of PZT films.

Copyright

References

Hide All
[1] Hren, P.D., Rou, S.H., Al-Shareef, H.N., Ameen, M.S., Auciello, O., and Kingon, A.I., presented at the 1991 Symposium on Integrated Ferroelectrics, Colorado Springs, CO, 1991; submitted to Ferroelectrics.
[2] Savin, W., Weir, B.E., Katz, A., Chu, S.N.G., Nakahara, S., and Harris, D.W. in Advanced Metallization in Microelectronics, edited by Katz, A., Murarka, S.P., Appelbaum, A. (Mater. Res. Soc. Proc. 181, Pittsburgh, PA, 1990) pp 227231.
[3] Parikh, N.R., Stephen, J.T., Swanson, M.L., and Myers, E.R., in Ferrelcric Thin Films, edited by Myers, E.R. and Kingon, A.I. (Mater. Res. Soc. Proc. 200, Pittsburgh, PA, 1990) pp 193198.
[4] Roy, R.A., Etzold, K.F., and Cuomo, J.J., in Ferroelectric Thin Films, edited by Myers, E.R. and Kingon, A.I. (Mater. Res. Soc. Proc. 200, Pittsburgh, PA, 1990) pp 141152.
[5] Bruchhaus, R., Huber, H., Pitzer, D. and Wersing, W., presented at the Seventh European Meeting on Ferroelectricity, Dijon, France 1991, submitted to Ferroelectrics.
[6] Doolittle, L.R., Nucl. Inst. Meth. B9,334(1985); B15, 227 (1986).
[7] Zalar, A., Thin Solid Films, 124, 223 (1985).
[8] Malinowski, E. R. and Howery, D. G., Factor Analysis in Chemistry, John Wiley & Sons, New York (1980).
[9] Scheithauer, U., Hosler, W. and Riedl, G., Surf. Interface Anal., to be published.

Investigation of Pt Bottom Electrodes for "In-Situ" Deposited Pb(Zr,Ti)O3 (PZT) thin Films

  • Rainer Bruchhaus (a1), Dana Pitzer (a1), Oliver Eibl (a1), Uwe Scheithauer (a1) and Wolfgang Hoesler (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.