MgO and Mg1-xTixO thin films were deposited by the electrostatic spray deposition method using Mg(tmhd)2 and Ti(O i Pr)2(tmhd)2 as source materials and tetrahydrofuran and 1-octyl alcohol as solvents. The refractive index of the films shows a strong change from 1.73 for MgO to 2.39 for TiO2. The optical band gap energy values are 3.83 eV for TiO2 film and higher than 5.1 eV for films of Mg/(Mg+Ti) > 0.67. The discharge voltage and current increased with a content of Ti in Mg1-xTixO films. All these changes are closely associated with different Mg/(Mg+Ti) ratios of the films.