Skip to main content Accessibility help
×
Home

Investigation of effects of ion beam irradiation on properties of magnesium oxide films

  • Yasuhiko Morimoto (a1), Yoshikazu Tanaka (a2) and Ari Ide-Ektessabi (a3)

Abstract

Magnesium oxide (MgO) film is commonly used as protecting layer for alternative current plasma display panels (AC-PDPs). Low energy ion induced secondary electron emission coefficient (γ) is one of the important factors to improve performance of AC-PDPs. The aim of this study is to prepare MgO films with high γ using ion beam assisted deposition (IBAD). The film composition, density, and crystal orientation were also investigated. The results suggest that MgO films with high γ can be obtained using IBAD. On the other hand, as the assisted ion beam energy increased to more than 500eV during deposition, (200)-oriented film with low γ grew preferentially and then the γ decreased.

Copyright

References

Hide All
1 Boeuf, J P, J. Phys. D: Appl. Phys. 36, R53 (2003).
2 Urade, T., Iemori, T., Osawa, M., Nakayama, N., and Morita, I., IEEE Trans. Electron Devices 23, 313 (1976).
3 Hur, M.S., Lee, J.K., Kim, H.C., and Kang, B.K., IEEE Trans. Plasma Science 29, 861 (2001).
4 Yoshida, K., Uchiike, H., and Sawa, M., IEICE Trans. Electron E82-C, 1798 (1999).
5 Moon, K.S., Lee, J., Whang, K.W., J. Appl. Phys. 86, 4049 (1999).
6 Koshida, N., and Yoshida, S., Appl. Phys. Lett. 32, 708 (1978).
7 Choi, E.H., Oh, H.J., Kim, Y.G., Ko, J.J., Lim, J.Y., Kim, J.G., Kim, D.I., Cho, G., and Kang, S.O., Jpn. J. Appl. Phys. 37, 7015 (1998).
8 Ektessabi, A.M., Sato, S., Kitamura, H., Masaki, Y., Vacuum 44, 213 (1993).
9 Ektessabi, A.M., Nucl. Instrum. Methods Phys. Res. B 99, 610 (1995).
10 Ide-Ektessabi, A., Nomura, H., Yasui, N., Tsukuda, Y., Thin Solid Films 447–448, 383 (2004).
11 Hagstrum, H.D., Phys. Review 122, 83 (1961).
12 Ziegler, J.F., Biersak, J.P., Littmark, U., The Stopping and Range of Ions in Matter, (Pergamon Press, 1985).
13 Oleszkiewicz, W., Romiszowski, P., Vacuum 70, 347 (2003).
14 Attard, G., Colin Barnes, , Surfaces, (Oxford Science Publications, Oxford, 1998) p. 62.

Keywords

Investigation of effects of ion beam irradiation on properties of magnesium oxide films

  • Yasuhiko Morimoto (a1), Yoshikazu Tanaka (a2) and Ari Ide-Ektessabi (a3)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed