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Investigation of Band-Gap States in AlGaN/GaN Hetero-Structures with Different Growth Conditions of GaN Buffer Layers

  • Yoshitaka Nakano (a1), Yoshihiro Irokawa (a2), Yasunobu Sumida (a3), Shuichi Yagi (a3) and Hiroji Kawai (a3)...

Abstract

We have investigated electronic band-gap states in AlGaN/GaN hetero-structures with different growth conditions of GaN buffer layers from a viewpoint of Carbon impurity incorporation into GaN, using photoluminescence (PL), capacitance-voltage (C-V) and steady-state photo-capacitance spectroscopy (SSPC) techniques. The Carbon incorporation was found to be enhanced with decreasing the growth temperature of the GaN buffer layer between 1120 and 1170 °C. Acting in concert, three specific deep levels located at ~2.07, ~2.70, and ~3.23 eV below the conduction band were found to become dense significantly at the low growth temperature. Therefore, these levels are probably attributable to Ga vacancies and/or Carbon acceptors produced by the Carbon impurity incorporation, and are likely in conjunction with each other.

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Investigation of Band-Gap States in AlGaN/GaN Hetero-Structures with Different Growth Conditions of GaN Buffer Layers

  • Yoshitaka Nakano (a1), Yoshihiro Irokawa (a2), Yasunobu Sumida (a3), Shuichi Yagi (a3) and Hiroji Kawai (a3)...

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