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Internal Oxidation and Mechanical Properties of Pt-IrO2 Thin Films

Published online by Cambridge University Press:  01 February 2011

Richard R. Chromik ,
Thirumalesh Bannuru  and
Richard P. Vinci
Richard R. Chromik
Affiliation:
Department of Materials Science and Engineering, Lehigh University, 5 East Packer Avenue, Bethlehem, PA 18015
Thirumalesh Bannuru
Affiliation:
Department of Materials Science and Engineering, Lehigh University, 5 East Packer Avenue, Bethlehem, PA 18015
Richard P. Vinci
Affiliation:
Department of Materials Science and Engineering, Lehigh University, 5 East Packer Avenue, Bethlehem, PA 18015
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Abstract

Pt-IrO2 films, approximately 200 nm thick, were fabricated by co-sputter deposition of Pt and Ir in an Ar-O2 mixture followed by annealing at 700°C in O2 for 4 hours. X-ray photoelectron spectroscopy and x-ray diffraction measurements indicate the presence of IrO2 throughout the thickness of the films. After a thermal cycle in vacuum to 700°C, the room temperature residual stress is significantly lower in the internally oxidized films than in pure Pt films of similar thickness subjected to identical cycling. Initial analysis of the behavior of the films during thermal cycling indicates that the primary cause for the difference in residual stress level is a decrease in the thermoelastic slope associated with the introduction of IrO2.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 795: Symposium U – Thin Films - Stresses and Mechanical Properties X , 2003 , U8.13
Copyright
Copyright © Materials Research Society 2004

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References

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