Skip to main content Accessibility help
×
Home

Interference lithography for 3D photonic band gap crystal layer by layer fabrication.

  • A Feigel (a1), Z. Kotler (a1), B. Sfez (a1), A. Arsh (a2), M. Klebanov (a2) and V. Lyubin (a2)...

Abstract

We present fabrication of 3D photonic band gap woodpile crystals from photosensitive chalcogenide glass with the help of interference lithography and layer by layer construction. The alignment method is described, which is scalable to extremely small feature sizes required for photonic crystals in the visible region.

Copyright

References

Hide All
1. Lin, S.Y., Fleming, J.G., Hetherington, D.L., Smith, B.K., Biswas, R., Ho, K.M., Sigalas, M.M., Zubrzycki, W., Kurtz, S.R. and Blur, J., Nature, 394, 251, 1998
2. Noda, S., Tomoda, K., Yamamoto, N. and Chutinan, A., Science, 289, 604, 2000
3. Feigel, A., Kotler, Z., Sfez, B., Arsh, A., Klebanov, M. and Lyubin, V., Appl. Phys. Lett., 77, 3221, 2000
4. Feigel, A., Kotler, Z. and Sfez, B., submitted for publication
5. Yamamoto, N. and Noda, S., Jpn. J. Appl. Phys, 37, 3334, 1998

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed