Skip to main content Accessibility help
×
Home

Interfaces in Ferroelectric Metal Oxide Heterostructures

  • R. Ramesh (a1), J. Lee (a1), V. G. Keramidas (a1), D. K. Fork (a2), S. Ghonge (a3), E. Goo (a3) and O. Auciello (a4)...

Abstract

Realization of a viable nonvolatile ferroelectric thin film memory technology hinges on the successful solution of the reliability problems associated with the ferroelectric capacitor concurrent with the integration of these materials with the appropriate Si-CMOS based drive electronics. This integration process introduces a variety of structural, chemical, ionic and electronic interfaces in the memory elements. In this paper, the influence of some of the interfaces on the ferroelectric properties and on the process integration is discussed.

Copyright

References

Hide All
1. See for example, Proc. of MRS Spring 1993 Meeting, San Francisco, CA, April 1993, Eds. Myers, E.R., Tuttle, B.A., Desu, S.B. and Larsen, P.K., Materials Research Society, Pittsburgh, PA (1993); Proc. of Fifth Int. Symp. on Integrated Ferroelectrics, Colorado Springs, CO., Ed. CA. Paz de Araujo, University of Colorado, Colorado Springs, CO.,April 1993.
2. Scott, J.F. and Araujo, C.A.Paz de, Science, 246, 1400(1989); M.Sayer and K.Sreenivas, Science 247, 1056(1990); G.H.Haertling, J. of Vacuum Science and Technology, 9, 414(1991).
3. Sinharoy, S., Buhay, H., Lampe, D.R. and Francombe, M.H., J. of Vac. Science and Technology, A10, 1554(1992).
4. Evans, J.T. and Womack, R.D., IEEE J. of Solid State Circuits, 23, 1171(1988).
5. Dey, S.K. and Zuleeg, R., Ferroelectrics, 108, 37(1990).
6. Ramesh, R., Inam, A., Wilkens, B., Chan, W.K., Hart, D.L., Luther, K., and Tarascon, J.M., Science, 252, 944(1991).
7. Abt, N.E., Misic, P., Zehngut, D. and Regan, E., Proc. of Fourth Int. Symp. on Integrated Ferroelectrics, Monterey, CA, Ed. Paz de Araujo, CA., University of Colorado, Colorado Springs, CO., March 1992, pp 533540; S.B.Desu and I.K.Y00, ibid, pp640-656.
8. Wolf, R.M., in Materials Research Society Fall Meeting Symposium on “Ferroelectric Thin Films II”, Boston, MA, Dec, 1991, Eds. A.Kingon, E.R.Myers and B.Tuttle, Materials Research Society, Pittsburgh, PA; J.T.Cheung, and R.R.Neurgaonkar, in Proc. of Fourth Int. Symp. on Integrated Ferroelectrics, Monterey, CA, March 1992, Ed. CA. Paz de Araujo, University of Colorado, Colorado Springs, CO.
9. Ramesh, R., Chan, W.K., Wilkens, B., Gilchrist, H., Sands, T., Tarascon, J.M., Keramidas, V.G., Fork, D.K., Lee, J. and Safari, A., Appl. Phys. Lett., 61, 1537(1992); J.Lee, L.Johnson, A.Safari, R.Ramesh, T.Sands, H.Gilchrist and V.G.Keramidas, Appl. Phys. Lett., 63, 27(1993).
10. Ramesh, R., Gilchrist, H., Sands, T., Keramidas, V.G., Haakenaasen, R. and Fork, D.K., Appl. Phys. Lett., 63, 3592(1993).
11. Eom, C.B., VanDover, R.B., Phillips, J.M., Fleming, R.M., Cava, R.J., Marshall, J.H., Werder, D. J., Chen, C.H. and Fork, D.K., in Proc. of MRS Spring Meeting Symposium, “Ferroelectric Thin Films III”, San Francisco, CA, April 1993, ppl45150, Eds. E. R.Myers, B.A.Tuttle, S.B.Desu and P.K.Larsen, Materials Research Society, Pittsburgh, PA (1993).
12. Ramesh, R., Lee, J., Dutta, B., Ravi, T.S., Sands, T. and Keramidas, V.G., in Proc. of Fifth Int. Symposium on Integrated Ferroelectrics, Colorado Springs, CO, March 1993, Ed. CA. Paz de Araujo, University of Colorado, Colorado Springs, CO, Integrated Ferroelectrics, in press.
13. Lichtenwalner, D.J., Dat, R., Auciello, O. and Kingon, A.I., in Proc. of the Eighth Int. Meeting on Ferroelectricity, August 1993, Maryland, USA, in press, 1993.
14. Ramesh, R., Sands, T., Keramidas, V.G., J. of Electronic Materials, 23, 19(1994); R.Ramesh, J.Lee, T.Sands, V.G.Keramidas and CAuciello, Appl. Phys. Lett., in press.
15. Ghonge, S., Goo, E., Ramesh, R., Haakenaasen, R. and Fork, D.K., Appl. Phys. Lett., in press.
16. Dimos, D., Warren, W.L., Sinclair, M.B., Tuttle, B.A. and Schwartz, R.W., submitted to J. of Appl. Phys.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed