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Interdigital Capacitive Array of tree-like Carbon Nanotubes on Silicon-based Membranes for Sensor Applications

  • Aida Ebrahimi (a1), Yaser Abdi (a2), Shamsoddin Mohajerzadeh (a3) and Sarah Paydavosi (a4)

Abstract

We have grown tree-like vertically-aligned carbon nanotubes (CNTs) on silicon substrate, suitable for highly sensitive interdigital capacitive sensors. As an application, we present a sensitive pressure sensor with branched CNTs as its capacitance plates.

After realization of the interdigital structure, the growth of CNTs has been achieved through direct-current plasma enhanced chemical vapor deposition (DC-PECVD) method. A sequential growth and hydrogenation has led to the formation of multiple branched structures of nanotubes. The growth of tree-like CNTs on the interdigitally patterned substrate results in a high overlap between adjacent fingers and consequently a significant response to mechanical variations of the membrane as a result of the applied pressure.

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Keywords

Interdigital Capacitive Array of tree-like Carbon Nanotubes on Silicon-based Membranes for Sensor Applications

  • Aida Ebrahimi (a1), Yaser Abdi (a2), Shamsoddin Mohajerzadeh (a3) and Sarah Paydavosi (a4)

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