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Interdiffusion of Amorphous Si/Ge Multilayers Under Hydrostatic Pressure

  • Steven D. Theiss (a1), S. Mitha (a1), F. Spaepen (a1) and M. J. Aziz (a1)

Abstract

We report initial results of an x-ray diffraction study of the pressure-dependence of the interdiffusion rate in amorphous Si/Ge Multilayers. Anneals were performed in a diamond anvil cell at 700 K for various pressures and durations. Interdiffusion was measured by Monitoring the rate of decay of the artificial Bragg peaks associated with the multilayer periodicity. A consistent increase in diffusivity was seen with pressure, characterized by an activation volume of -25±11 percent of the atomic volume of Si. An atomistic mechanism that Might account for such behavior is discussed.

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Interdiffusion of Amorphous Si/Ge Multilayers Under Hydrostatic Pressure

  • Steven D. Theiss (a1), S. Mitha (a1), F. Spaepen (a1) and M. J. Aziz (a1)

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