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Integrating Carbon Nanotubes For Atomic Force Microscopy Imaging Applications

  • Qi Ye (a1) (a2), Alan M. Cassell (a1) (a2), Hongbing Liu (a2), Jie Han (a1) (a2) and Meyya Meyyappan (a1)...

Abstract

Carbon nanotube (CNT) related nanostructures possess remarkable electrical, mechanical, and thermal properties. To produce these nanostructures for real world applications, a large-scale controlled growth of carbon nanotubes is crucial for the integration and fabrication of nanodevices and nanosensors. We have taken the approach of integrating nanopatterning and nanomaterials synthesis with traditional silicon microfabrication techniques. This integration requires a catalyst or nanomaterial protection scheme. In this paper, we report our recent work on fabricating wafer-scale carbon nanotube AFM cantilever probe tips. We will address the design and fabrication considerations in detail, and present the preliminary scanning probe test results. This work may serve as an example of rational design, fabrication, and integration of nanomaterials for advanced nanodevice and nanosensor applications.

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*Corresponding author: qye@mail.arc.nasa.gov

References

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2. Li, J., Lu, Y., Ye, Q., Cinke, M., Han, J., and Meyyappan, M.. Carbon nanotube sensors for gas and organic vapor detection. Nano Letters, Vol. 3, No. 7, 929933 (2003).
3. Li, J., Ye, Q., Cassell, A., Ng, H. T., Stevens, R., Han, J., and Meyyappan, M.. Bottom-up approach for carbon nanotube interconnects. Applied Physics Letters, Vol. 82, No. 15, 24912493 (2003).
4. Cassell, A. M., Ye, Q., Cruden, B. A., Li, J., Sarrazin, P. C., Ng, H. T., Han, J., and Meyyappan, M.. Combinatorial Chips For Optimizing The Growth and Integration of Carbon Nanofiber Based Devices. Nanotechnology. 15, 915 (2004).
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Integrating Carbon Nanotubes For Atomic Force Microscopy Imaging Applications

  • Qi Ye (a1) (a2), Alan M. Cassell (a1) (a2), Hongbing Liu (a2), Jie Han (a1) (a2) and Meyya Meyyappan (a1)...

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