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Integrating Carbon Nanotubes For Atomic Force Microscopy Imaging Applications

Published online by Cambridge University Press:  15 March 2011

Qi Ye ,
Alan M. Cassell ,
Hongbing Liu ,
Jie Han  and
Meyya Meyyappan
Qi Ye*
Affiliation:
Center for Nanotechnology, NASA Ames Research Center, Moffett Field, California 94035, U.S.A. Integrated Nanosystems, Inc., NASA Research Park, Moffett Field, California 94035, U.S.A.
Alan M. Cassell
Affiliation:
Center for Nanotechnology, NASA Ames Research Center, Moffett Field, California 94035, U.S.A. Integrated Nanosystems, Inc., NASA Research Park, Moffett Field, California 94035, U.S.A.
Hongbing Liu
Affiliation:
Integrated Nanosystems, Inc., NASA Research Park, Moffett Field, California 94035, U.S.A.
Jie Han
Affiliation:
Center for Nanotechnology, NASA Ames Research Center, Moffett Field, California 94035, U.S.A. Integrated Nanosystems, Inc., NASA Research Park, Moffett Field, California 94035, U.S.A.
Meyya Meyyappan
Affiliation:
Center for Nanotechnology, NASA Ames Research Center, Moffett Field, California 94035, U.S.A.
*
*Corresponding author: qye@mail.arc.nasa.gov
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Abstract

Carbon nanotube (CNT) related nanostructures possess remarkable electrical, mechanical, and thermal properties. To produce these nanostructures for real world applications, a large-scale controlled growth of carbon nanotubes is crucial for the integration and fabrication of nanodevices and nanosensors. We have taken the approach of integrating nanopatterning and nanomaterials synthesis with traditional silicon microfabrication techniques. This integration requires a catalyst or nanomaterial protection scheme. In this paper, we report our recent work on fabricating wafer-scale carbon nanotube AFM cantilever probe tips. We will address the design and fabrication considerations in detail, and present the preliminary scanning probe test results. This work may serve as an example of rational design, fabrication, and integration of nanomaterials for advanced nanodevice and nanosensor applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 820: Symposia O/R – Nanoengineered Assemblies and Advanced Micro/Nanosystems , 2004 , O4.9
Copyright
Copyright © Materials Research Society 2004

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References

1. Dresselhaus, M.S., Dresselhaus, G., Avouris, Ph. (Eds.), Carbon Nanotubes, Synthesis, Structure, Properties, and Applications, Topics Appl. Phys. 80, Springer, (2001).Google Scholar
2. Li, J., Lu, Y., Ye, Q., Cinke, M., Han, J., and Meyyappan, M.. Carbon nanotube sensors for gas and organic vapor detection. Nano Letters, Vol. 3, No. 7, 929–933 (2003).Google Scholar
3. Li, J., Ye, Q., Cassell, A., Ng, H. T., Stevens, R., Han, J., and Meyyappan, M.. Bottom-up approach for carbon nanotube interconnects. Applied Physics Letters, Vol. 82, No. 15, 2491–2493 (2003).Google Scholar
4. Cassell, A. M., Ye, Q., Cruden, B. A., Li, J., Sarrazin, P. C., Ng, H. T., Han, J., and Meyyappan, M.. Combinatorial Chips For Optimizing The Growth and Integration of Carbon Nanofiber Based Devices. Nanotechnology. 15, 9–15 (2004).Google Scholar
5. Li, J., Ng, H. T., Cassell, A., Fan, W., Chen, H., Ye, Q., Koehne, J., Han, J., and Meyyappan, M.. Carbon nanotube nanoelectrode array for ultra sensitive DNA detection. Nano Letters, Vol. 3, No. 5, 597–602 (2003).Google Scholar
6. Cruden, B. A., Cassell, A. M., Ye, Q., and Meyyappan, M.. Reactor design considerations in the hot filament/direct current plasma synthesis of carbon nanofibers. Journal of Applied Physics, Vol. 94, No. 6, 4070–4078 (2003).Google Scholar