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Installing and Operating Fegtem's

Published online by Cambridge University Press:  10 February 2011

C. J. D. Hetherington ,
A. G. Cullis ,
S. Walker ,
J. Turner ,
E.C. Nelson  and
M.A. O'Keefe
C. J. D. Hetherington
Affiliation:
Sheffield University, Department of Electronic and Electrical Engineering, Mappin Street, Sheffield, SI 3JD, UK
A. G. Cullis
Affiliation:
Sheffield University, Department of Electronic and Electrical Engineering, Mappin Street, Sheffield, SI 3JD, UK
S. Walker
Affiliation:
Sheffield University, Department of Electronic and Electrical Engineering, Mappin Street, Sheffield, SI 3JD, UK
J. Turner
Affiliation:
Lawrence Berkeley National Laboratory, National Center for Electron Microscopy, MS 72-150, Berkeley, CA 94720, USA
E.C. Nelson
Affiliation:
Lawrence Berkeley National Laboratory, National Center for Electron Microscopy, MS 72-150, Berkeley, CA 94720, USA
M.A. O'Keefe
Affiliation:
Lawrence Berkeley National Laboratory, National Center for Electron Microscopy, MS 72-150, Berkeley, CA 94720, USA
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Abstract

The latest transmission electron microscopes with field emission guns and imaging filters now provide much of the microanalysis and imaging necessary in applications such as ULSI device development. The installation and operating environment of the instruments are critical to their successful operation. Information from two such installations is presented here, one in a purpose built facility and the other in an existing building. Ground vibration, acoustic noise, stray electromagnetic fields, air flow and temperature variation are considered, and the measures implemented to achieve desirable levels of each parameter are discussed. The physical layout of an installation is also shown.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 523: Symposium U – Electron Microscopy of Semiconducting Materials & ULSI Devices , 1998 , 171
Copyright
Copyright © Materials Research Society 1998

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References

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