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Installing and Operating Fegtem's

  • C. J. D. Hetherington (a1), A. G. Cullis (a1), S. Walker (a1), J. Turner (a2), E.C. Nelson (a2) and M.A. O'Keefe (a2)...

Abstract

The latest transmission electron microscopes with field emission guns and imaging filters now provide much of the microanalysis and imaging necessary in applications such as ULSI device development. The installation and operating environment of the instruments are critical to their successful operation. Information from two such installations is presented here, one in a purpose built facility and the other in an existing building. Ground vibration, acoustic noise, stray electromagnetic fields, air flow and temperature variation are considered, and the measures implemented to achieve desirable levels of each parameter are discussed. The physical layout of an installation is also shown.

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1. Anderson, R.H., Design of the Electron Microscope Laboratory, volume 4 of Practical Methods in Electron Microscopy, edited by Glauert, A. M., North-Holland, Amsterdam, 1975.
2. O'Keefe, M. A., Ultramicroscopy 47 (1992) pp 2 82–29710.1016/0304-3991(92)90203-V
3. O'Keefe, M. A., Microscopy and Microanalysis, vol. 3, supp. 2, (1997) pp 11651166
4. Turner, J.H., O'Keefe, M.A., Mueller, R., Microscopy and Microanalysis, vol. 3, supp. 2, (1997) pp 11771178
5. Buffat, P.A., private communication

Installing and Operating Fegtem's

  • C. J. D. Hetherington (a1), A. G. Cullis (a1), S. Walker (a1), J. Turner (a2), E.C. Nelson (a2) and M.A. O'Keefe (a2)...

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