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Inorganic-organic Hybrid Materials (ORMOCER ® s) for Multilayer Technology – Passivation and Dielectric Behavior

  • R. Houbertz (a1), L. Fröhlich (a1), J. Schulz (a1) and M. Popall (a1)

Abstract

Inorganic-organic hybrid polymers (ORMOCER®s) have been synthesized by sol-gel processing. The materials can be functionalized such that their physical and chemical properties can be reproducibly tailored towards the desired application, i.e., electronics, optics (passives/actives) or passivation technology. Besides, the materials which show negative resist behavior, can be patterned by UV exposure with good resolution. The materials are well-suited for thin and thick film technology using conventional coating technology, applied in multi-layer technology. We here particularly focus on materials for passivation against environmental influences, which additionally exhibit very good dielectric properties.

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Registered trademark of Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. in Germany

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Inorganic-organic Hybrid Materials (ORMOCER ® s) for Multilayer Technology – Passivation and Dielectric Behavior

  • R. Houbertz (a1), L. Fröhlich (a1), J. Schulz (a1) and M. Popall (a1)

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