Skip to main content Accessibility help
×
Home

Injection Doping of Ultrathin Microcrystalline Silicon films Prepared by CC-CVD

  • S. Koynov (a1), S. Grebner (a2), R. Schwarz (a3), L. Vassilev (a4), I. Sieber (a5), M. Schmidt (a5) and W. Fuhs (a5)...

Abstract

Recently, we have proposed a cyclic method, referred to as Closed Chamber CVD (CC-CVD), for the preparation of μc-Si films of high crystalline fraction at increased deposition rates. In this work we first report new process conditions of CC-CVD, which result in growth of highly crystalline films with a sharp interface on a foreign substrate. Then these conditions are further used together with a pulsed injection of B2H6 in an appropriate moment of each cycle, so that the disturbance of the crystallization process is prevented. A series of ultrathin μc-Si films, doped by this technique, is characterized by conductivity measurements, SEM, Raman Scattering, optical transmission and UV reflection. A strong reduction of the transient interface layer is achieved and conductivity as high as 2 S/cm <p-type> with an activation energy of 27 meV is reached.

Copyright

References

Hide All
1. Keppner, H., Kroll, U., Meier, J., Shah, A., Sol. St. Phenomena 44–46, 97 (1995)
2. Finger, F., Hapke, P., Luysberg, M., Carius, R., Wagner, H., Appl. Phys. Lett. 65, 2588 (1994)
3. Koynov, S., Schwarz, R., Fischer, T., Grebner, S., Muender, H., Jpn. J. Appl. Phys. 33, 4534 (1994)
4. Koynov, S., Grebner, S., Radojkovic, P., Hartmann, E., Schwarz, R., Vasilev, L., Krankenhagen, R., Sieber, I., Henrion, W., Schmidt, M., J. Non-Cryst. Sol. 198–200, 1012 (1996)
5. Fluckiger, R., Meier, J., Shah, A., Catana, A., Brunei, M., Nguyen, H.V., Collins, R.W., Carius, R., Mat. Res. Soc. Symp. Proc. 336, 511 (1994)

Injection Doping of Ultrathin Microcrystalline Silicon films Prepared by CC-CVD

  • S. Koynov (a1), S. Grebner (a2), R. Schwarz (a3), L. Vassilev (a4), I. Sieber (a5), M. Schmidt (a5) and W. Fuhs (a5)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed