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Initial Phase formation at the Interface of Ni, Pd, or Pt and Si

  • R. J. Nemanich (a1), C. C. Tsai (a1), B. L. Stafford (a1), J. R. Abelson (a2) and T. W. Sigmon (a2)...

Abstract

The initial phase formation at the interface of the near noble metals (Ni, Pd, and Pt) and Si is studied by Raman spectroscopy and Rutherford ion-backscattering. The results show that a crystalline Pd2Si forms immediately at the interface of Pd and Si while a disordered intermixed phase of composition ∼M2Si forms for Ni and Pt at 150°C. The results are discussed in terms of the disorder due to the kinetic process and the stability of the crystalline phase.

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1. Ottaviani, G., J. Vac. Sci. Technol. 16, 1112(1979).
2. Rubloff, G. W. and Ho, P. S., Thin Solid Films 93, 21(1982).
3. For a review see Knights, J. C. and Lucovsky, G., CRC Crit. Rev. in Solid State and Mater. Sci., 211(1980).
4. Fritzsche, H. and Tsai, C. C., Solar Mater. 1, 471(1979).
5. Nemanich, R. J., Tsai, C. C., Thompson, M. J., and Sigmon, T. W., J. Vac. Sci. Technol. 19, 685(1981).
6. Nemanich, R. J., Sigmon, T. W., Johnson, N. M., Moyer, M. D., and Lau, S. S., in Laser and Electron-Beam Solid Interactions and Materials Processing, edited by Gibbons, J. F., Hess, L. D., and Sigmon, T. W.(North-Holland, New York,1981), p. 541.
7. Nemanich, R. J., Thompson, M. J., Jackson, W. B., Tsai, C. C., and Stafford, B. L., J. Vac. Sci. Technol. 19, 685(1981).
8. Tsaur, B. Y. and Nicolet, M A., Appl. Phys. Lett. 37, 708(1980).

Initial Phase formation at the Interface of Ni, Pd, or Pt and Si

  • R. J. Nemanich (a1), C. C. Tsai (a1), B. L. Stafford (a1), J. R. Abelson (a2) and T. W. Sigmon (a2)...

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