Skip to main content Accessibility help
×
Home

Influence of Platinum Bottom Electrodes on the Piezoelectric Performance of PZT Thin Films Hot Sputtered in a High Volume Production Tool

  • Dirk Kaden (a1), Hans-Joachim Quenzer (a1), Martin Kratzer (a2), Lorenzo Castaldi (a2), Bernhard Wagner (a1), Bernd Heinz (a2) and Robert Mamazza (a2)...

Abstract

In this work high quality ferroelectric PZT films have been prepared in-situ by hot RF magnetron sputtering. 200 mm wafer were coated with PZT films of 1 μm and 2 μm thickness at sputter rates of 45 nm/min in a high volume production sputtering tool. The films were grown on oxidized Si substrates prepared either with sputtered Ti/TiO2/Pt, sputtered Ti/TiO2/Pt/TiO2 or evaporated Ti/Pt bottom electrodes at substrate holder temperatures in the range from 550 °C to 700 °C. At these temperatures, the material nucleates in the requisite piezoelectric perovskite phase without need of an additional post annealing treatment.

The films were investigated with respect to their chemical composition and their crystallographic, piezoelectric and dielectric properties. At an intermediate chuck temperature of 600 °C the PZT thin films were characterized by a minimum volume fraction of secondary nonpiezoelectric phases. A Zr/(Zr+Ti) ratio of 0.53 has been achieved matching the morphotropic phase boundary. By improving the deposition process and poling procedure, a notable high e31,f coefficient of -17.3 C/m2 has been obtained. The corresponding longitudinal piezoelectric constant was determined to have an effective longitudinal piezoelectric coefficient d33,f of 160 pm/V.

Copyright

References

Hide All
1. Mounier, E., presented at 2nd piezoMEMS workshop, Switzerland (2011).
2. Setter, N., Piezoelectric Materials in Devices, edited by Setter, N. (Ceramics Laboratory, Lausanne, Switzerland, 2002), p.15.
3. Prume, K., Muralt, P., Calame, F., Schmitz-Kempen, T. and Tiedke, S., IEEE Trans. Ultras., Ferroelectr. Freq. Contr., 10 (20), 2005.
4. Härdtl, K. H., Rau, H., Solid State Communications, 7 (1), 4145 (1969).
5. Ishida, M., Matsunami, H., Tanaka, T., J. Appl. Phys. 48, 951 (1977).
6. Vasant Kumar, C. V. R., Pascual, R., Sayer, M., J. Appl. Phys. 71, 864 (1992).
7. Muralt, P., Maeder, T., Sagalowicz, L., Hiboux, S., Scalese, S., Naumovic, D., Agostino, R. G., Xanthopoulos, N., Mathieu, H. J., Patthey, L., and Bullock, E. L., J. Appl. Phys. 83, 3835 (1998)

Keywords

Related content

Powered by UNSILO

Influence of Platinum Bottom Electrodes on the Piezoelectric Performance of PZT Thin Films Hot Sputtered in a High Volume Production Tool

  • Dirk Kaden (a1), Hans-Joachim Quenzer (a1), Martin Kratzer (a2), Lorenzo Castaldi (a2), Bernhard Wagner (a1), Bernd Heinz (a2) and Robert Mamazza (a2)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.