Skip to main content Accessibility help
×
Home

Influence of H2 on Ge Surface Segregation in Si/SiGe Heterostructures Grown by RTP/VLP-CVD

  • Zhang Rong (a1), Huang Hongbin (a1), Gu Shulin (a1), Yang Kai (a1), Shi Yi (a1), Wang Ronghua (a1), Zheng Youdou (a1) and Feng Duan (a1)...

Abstract

In this paper we report the influence of H2 on Ge surface segregation in Si/SiGe heterostructures. The sample were grown on Si(001) substrate tinder different gas flow of H2 by RTP/VLP-CVD. Auger electron energy spectroscopy(AES) has been used to determine the Ge distribution in Si/SiGe heterostructures. The results indicate that H2 can strongly alter the mechanism of Ge surface segregation and change the distribution of Ge atoms.

Copyright

References

Hide All
[1] fox example, Youdou, ZHENG, Rong, ZHANG, Liqun, HU Shulin, GU, Ronghua, WANG, Ping, HAN and Ruolian, JIANG, in Mechanisms of Heteroepitaxial Growth, edited by Chisholm, M.F., Hull, R., Schowalter, L.J. and Garrison, B.J., pp227232.
[2] Fukatsu, S., Usami, N., Fujita, K., Yaguchi, H., Shiraki, Y. and Ito, R, J. Cryst. Growth, 127,401(1993).
[3] Fujita, K., Fukatsu, S., Yaguchi, H., Shiraki, Y. and Ito, R., Appl. Phys. Lett., 59, 2240(1991)
[4] Fukatsu, S., Fujita, K. Yaguchi, J., Shiraki, Y. and , Ito, Appl. Phys. Lett., 59, 2103(1991)
[5] Karimi, M., Kaplan, T., Mostoller, M. and Jesson, D.E., Phys. Rev. B, 47, 9931(1993)
[6] GU, Shulin, ZHANG, Rong, HAN, Ping, WANG, Ronghua, HU, Liqun and ZHENG, Youdou, in Proceedings of 21st International Conference on the Physics of Semiconductors, August 10-14, 1992, Beijing, CHINA, Edited by JIANG, Ping and ZHENG, Houzhi, World Scientific, Singapore, p598
[7] Rong, ZHANG, Youdou, ZHENG, Ruolian, JIANG, Liqun, HU, Peixin, ZHONG, Shidong, YU, Qi, LI, Duan, FENG and Guangxi, CHEN, Appl. Surf. Sci, 48/49, 356(1991)
[8] GU, Shulin, ZHENG, Youdou, ZHANG, Rong, WANG, Ronghua and ZHONG, Peixin, J. Appl. Phys., 1994
[9] Harris, J. J., Ashenford, D. E., Foxon, C.T., Dobson, P. J. and Joyce, B.A.. Appl. Phys. A, 33, 87(1984)
[10] Malik, R., Gulari, E., Li, S. H. and Bhattacharya, P. K., J. Apply. Phys., 73, 5193(1993)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed