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Influence of Gas Atmosphere on the Plasticity of Metal Thin Films

  • T. Wübben (a1), G. Dehm (a2) and E. Arzt (a1) (a3)


Stresses in thin films are routinely measured by the so-called substrate curvature technique. These experiments are usually carried out in air or under a protective gas atmosphere. In this contribution we describe a new set-up capable of performing substrate curvature measurements under ultra-high vacuum conditions. The advantages are the absence of possible artifacts due to gas/film interactions, better control of gas composition, and the possibility to measure chemical effects on mechanical properties in a controlled way. We present first results that indicate an unexpected sensitivity even of polycrystalline Cu films to the gas environment.



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1. Kobrinsky, M. J. and Thompson, C. V., Applied Physics Letters 73, 2429 (1998).
2. Weiss, D., Gao, H., and Arzt, E., Acta Materialia 49, 2395 (2001).
3. Keller, R.-M., Baker, S. P., and Arzt, E., Acta Materialia 47, 415 (1999).
4. Gao, H., Zhang, L., Nix, W. D., Thompson, C. V., and Arzt, E., Acta Materialia 47, 2865 (1999).
5. Sakong, S. and Gross, A., Surface Science 525, 107 (2003).
6. Nix, W. D., Metallurgical Transactions A 20A, 1989 (1989).
7. Flinn, P. A., in “Thin Films: Stresses and Mechanical Properties” (Bravman, J. C., Nix, W. D., Barnett, D. M., and Smith, D. A., eds.), Vol. 130, p. 4151. Materials Research Society, Pittsburgh, PA, 1989.
8. Balk, T. J., Dehm, G., and Arzt, E., Acta Materialia 51, 4471 (2003).
9. Dehm, G., Balk, T. J., Edongue, H., and Arzt, E., Microelectronic Engineering 70, 412 (2003).
10. Ammon, C., Bayer, A., Held, G., Richter, B., Schmidt, T., and Steinruck, H.-P., Surface Science 507-510, 845 (2002).
11. Francis, S. M., Leibsle, F. M., Haq, S., Xiang, N., Bowker, M., Surface Science 315, 284 (1994).
12. Ryberg, R., The Journal of Chemical Physics 82, 567 (1985).

Influence of Gas Atmosphere on the Plasticity of Metal Thin Films

  • T. Wübben (a1), G. Dehm (a2) and E. Arzt (a1) (a3)


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