Article contents
Influence of Bottom Contact Material on the Selective Chemical Vapor Deposition of Crystalline GeSbTe Alloys
Published online by Cambridge University Press: 01 February 2011
Abstract
Selective Chemical Vapor Deposition of Crystalline Ge-Sb-Te alloys initiating at the bottom metal contact of vias of various sizes has been accomplished. The method is based on selecting Sb and Te precursors which do not decompose on dielectric surfaces in the utilized temperature range.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 2010
References
- 2
- Cited by