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Influence of Beam and Target Properties on the Excimer Laser Deposition of Yba2Cu3O7−x Thin Films

  • S. R. Foltyn (a1), R. E. Muenchausen (a1), R. C. Estler (a1), E. Peterson (a1), W. B. Hutchinson (a1), K. C. Ott (a1), N. S. Nogar (a1), K. M. Hubbard (a1), R. C. Dye (a1) and X. D. Wu (a1)...

Abstract

Target modification by excimer laser exposure has been investigated. Under conditions typical in the fabrication of superconducting thin films, deposition rate decreases with exposure and significant physical and chemical modifications occur on the target surface. These modifications do not inhibit congruent evaporation.

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Influence of Beam and Target Properties on the Excimer Laser Deposition of Yba2Cu3O7−x Thin Films

  • S. R. Foltyn (a1), R. E. Muenchausen (a1), R. C. Estler (a1), E. Peterson (a1), W. B. Hutchinson (a1), K. C. Ott (a1), N. S. Nogar (a1), K. M. Hubbard (a1), R. C. Dye (a1) and X. D. Wu (a1)...

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