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Influence of a Capping Layer on the Mechanical Properties of Copper Films

Published online by Cambridge University Press:  21 February 2011

R.-M. Keller ,
S. Bader ,
R. P. Vinci  and
E. Arzt
R.-M. Keller
Affiliation:
Max-Planck-Institut für Metallforschung and University of Stuttgart, Seestr. 92, 70174 Stuttgart, Germany
S. Bader
Affiliation:
Max-Planck-Institut für Metallforschung and University of Stuttgart, Seestr. 92, 70174 Stuttgart, Germany
R. P. Vinci
Affiliation:
Department of Materials Science and Eng., Stanford University, Stanford, CA 94305–2205
E. Arzt
Affiliation:
Max-Planck-Institut für Metallforschung and University of Stuttgart, Seestr. 92, 70174 Stuttgart, Germany
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Abstract

The substrate curvature technique was employed to study the mechanical properties of 0.6 μm and 1.0 μm Cu films capped with a 50 nm thick Si3N4 layer and to compare them with the mechanical properties of uncapped Cu films. The microstructures of these films were also investigated. Grain growth, diffusional creep and dislocation processes are impeded by the cap layer. This is evident in the form of high stresses at high temperatures on heating and at low temperatures on cooling. At intermediate temperatures on heating and cooling, stress plateaus a relatively low stresses exist. This can be explained by the so-called Bauschinger effect. A film thickness dependence of the stresses in the film could not be observed for capped Cu films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 453
Copyright
Copyright © Materials Research Society 1995

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