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In situ X-ray Scattering Study of the Formation of Au Nano Crystals During Thermal Annealing

  • Do Young Noh (a1), Ki-Hyun Ryu (a2) and Hyon Chol Kang (a3)

Abstract

The transformation of Au thin films grown on sapphire (0001) substrates into nano crystals during thermal annealing was investigated by in situ synchrotron x-ray scattering and ex situ atomic force microscopy (AFM). By monitoring the Au(111) Bragg reflection and the low Q reflectivity and comparing them with ex situ AFM images, we found that polygonal-shape holes were nucleated and grow initially. As the holes grow larger and contact each other, their boundary turns into Au nano crystals. The Au nano crystals have a well-defined (111) flat top surface and facets in the in-plane direction.

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