Skip to main content Accessibility help
×
Home

In Situ Study of the Effects of Heavy-Ion Irradiation on Co-Evaporated Cosi2 Films

  • Charles W. Allen (a1) and David A. Smith (a2)

Abstract

The in situ ion irradiation capability of Argonne’s HVEM-Tandem User Facility has been employed to study effects of 1.5 MeV Kr+ irradiation and 300 kV electron irradiation on the crystallization of as-deposited and of partially crystallized 40 nm thick films of CoSi2. Ion fluxes ranged from 8.5×1014 to 6.8×1015 m−2s−1 for which beam heating effects may be neglected. The maximum electron flux at 300 kV was 0.8×1023 m−2S−1. The maximum temperature at which crystalline CoSi2 is amorphized by the ion irradiation of flux = 6.8×1015 m−2s−1 is between 250 and 280 K. At higher temperatures amorphous material crystallizes by growth of any preexisting crystals and by classical nucleation and growth, with radial growth rates which are proportional to ion flux. The average degree of transformation per ion is 4×10−26 m3 per ion. Thermally induced crystallization of as-deposited films occurs above approximately 420 K. For ion doses at least as low as 3.4×1016 m−2 ion irradiation at 300 K promotes thermal crystallization at 450 K, by virtue of enhanced apparent nucleation and at large doses, by enhanced growth rate.

Copyright

References

Hide All
[1] Smith, D. A. and Allen, C. W., Proc. Third Frontiers of Electr. Micr. in Mater. Sci., for Ultramicroscopy (1990).
[2] Allen, C. W. and Smith, D. A., Proc. Symp. on New Directions and Future Aspects of HVEM, for Ultramicroscopy (1990).
[3] Biersack, J. P. and Haggmark, L. J., Nucl. Instrum. Methods 174 (1980) 257.
[4] Smith, D. A., Tu, K.-N. and Weiss, B. Z., Ultramicroscopy 23 (1987) 405.
[5] Ridgway, M. C., Elliman, R. G., Thornton, R. P. and Williams, J. S., Appl. Phys. Lett. 56 (1990) 1992.
[6] Evans, P. V. and Smith, D. A., unpublished.
[7] Diaz de la Rubia, T., Averback, R. S., Hsieh, H. and Benedek, R., J. Mater. Res. 4 (1989) 579.
[8] Im, J. S. and Atwater, H. A., Appl. Phys. Lett. 57 (1990) 1766.
[9] Jackson, K. A., J. Mater. Res. 3 (1988) 1218
[10] Williams, J. S., Elliman, R. G., Brown, W. L. and Seidel, T. E., Phys. Rev Lett. 55 (1985) 1482.
[11] Ridgway, M. C., Elliman, R. G. and Williams, J. S., Appl. Phys. Lett. 56 (1990) 2117.

In Situ Study of the Effects of Heavy-Ion Irradiation on Co-Evaporated Cosi2 Films

  • Charles W. Allen (a1) and David A. Smith (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed