Skip to main content Accessibility help
×
Home

In Situ Observations of Beam-Induced Effects During High-Resolution Electron Microscopy

  • David J. Smith (a1), Ping Lu (a2), M. R. McCartney (a1) and R. Sharma (a1)

Abstract

A variety of electron-beam-induced effects, including oxidation, reduction and surface rearrangements are observed to occur at surfaces of oxides, fluorides and compound semiconductors during electron irradiation within the electron microscope. The extent and type of surface modifications observed are shown to depend upon the irradiation level, the residual microscope vacuum and the specimen temperature. For example, ex situ annealing of compound semiconductors leads to different end-products compared with in situ irradiation, thus showing that residual gas components can have a strong influence on the surface reactions. Electron irradiation of rutile during annealing at high temperature under ultrahigh vacuum conditions caused the rapid development of well-facetted holes without the usual intermediary phase seen at room temperature in conventional vacuum.

Copyright

References

Hide All
1. Hobbs, L.W., in Quantitative Electron Microscopy, edited by Chapman, J.N. and Craven, A.J. (Scottish Universities Summer Schools in Physics, Edinburgh, 1984) Chapter 17.
2. Smith, D.J., Podbrdsky, J., Swann, P.R. and Jones, J.S., in High-Resolution Microscopy of Materials, edited by Krakow, W., Ponce, F.A. and Smith, D.J. (Mater. Res. Soc Symp. Proc. 189, Boston, MA, 1989) pp. 289294.
3. Knotek, M.L. and Feibelman, P.J., Surface Science, 90, 78 (1979).
4. McCartney, M.R., and Smith, D.J., Surface Science, 221, 214 (1989).
5. Lichtman, D., Ultramicroscopy, 23, 291 (1987).
6. McCartney, M.R. and Smith, D.J., in High-Resolution Electron Microscopy of Defects in Materials, edited by Sinclair, R., Smith, D.J. and Dahmen, U. (Mater. Res. Soc. Symp. Proc. 183, San Francisco, CA, 1990) pp. 311316.
7. McCartney, M.R., Crozier, P.A., Weiss, J.K. and Smith, D. J., Vacuum, in press.
8. McCartney, M.R. and Smith, D.J., Surface Science, to be published.
9. Johnson, E. and Chadderton, L.T., Radiation Effects, 79, 183 (1983).
10. Rice, P., Crozier, P.A. and Egerton, R.F., in Proc. 21st Ann. Conf. MAS, (Hawaii, 1987), pp. 213216.
11. Diehl, P., McCartney, M.R. and Smith, D.J., Trans. Royal Microscopical Society, in press.
12. Sharma, R. and Eyring, L., in Materials Stability and Environmental Degradation, edited by Berkatt, A., Verink, E.D. Jr. and Smith, L.R. (Mater. Res. Soc. Symp. Proc. 125, Reno, NV, 1989) pp. 285290.
13. Petford-Long, A.K. and Smith, D.J., Phil. Mag., A54, 837 (1986).
14. Lu, P. and Smith, D.J., in Ref. [2], pp. 75–80.
15. Lu, P. and Smith, D.J., phys. stat. sol. (a), 107, 681 (1988).
16. Lu, P. and Smith, D.J., in Microscopy of Oxidation, edited by Lorimer, G. and Bennett, M. (Institure of Metals, London, 1989) in press.
17. Buckett, M.I., Strane, J., Luzzi, D.E., Zhang, J.P., Vessels, B.W. and Marks, L.D., Ultramicroscopy 29, 217 (1989).

In Situ Observations of Beam-Induced Effects During High-Resolution Electron Microscopy

  • David J. Smith (a1), Ping Lu (a2), M. R. McCartney (a1) and R. Sharma (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed