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Impurity Solubility and Redistribution Due to Recrystallization of Preamorphized Silicon

Published online by Cambridge University Press:  01 February 2011

Ray Duffy ,
Vincent Venezia ,
Marco Hopstaken ,
Geert Maas ,
Thuy Dao ,
Yde Tamminga ,
Fred Roozeboom  and
Karel van der Tak
Ray Duffy
Affiliation:
ray.duffy@philips.com, Philips Research Leuven, CMOS Module Integration, Kapeldreef 75, Leuven, N/A, 3001, Belgium
Vincent Venezia
Affiliation:
vincent.venezia@axcelis.com, Axcelis Technologies, 108 Cherry Hill Drive, Beverly, MA, 01915, United States
Marco Hopstaken
Affiliation:
marco.hopstaken@philips.com, Philips Semiconductors Crolles, 850 Rue Jean Monnet, Crolles, N/A, 38920, France
Geert Maas
Affiliation:
geert.maas@philips.com, Philips Research Laboratories, Prof. Holstlaan 4, Eindhoven, N/A, 5656 AA, Netherlands
Thuy Dao
Affiliation:
thuy.dao@philips.com, Philips Research Laboratories, Prof. Holstlaan 4, Eindhoven, N/A, 5656 AA, Netherlands
Yde Tamminga
Affiliation:
y.tamminga@philips.com, Philips Research Laboratories, Prof. Holstlaan 4, Eindhoven, N/A, 5656 AA, Netherlands
Fred Roozeboom
Affiliation:
fred.roozeboom@philips.com, Philips Research Laboratories, Prof. Holstlaan 4, Eindhoven, N/A, 5656 AA, Netherlands
Karel van der Tak
Affiliation:
karel.van.der.tak@philips.com, Philips Research Laboratories, Prof. Holstlaan 4, Eindhoven, N/A, 5656 AA, Netherlands
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Abstract

The use of silicon substrate preamorphization in ultrashallow junction formation has increased in recent years. The reduction of channeling during impurity implantation, coupled with higher-than-equilibrium metastable solubility levels, produces scaled junctions with low resistances. However, a number of physical phenomena arise that must be considered for proper impurity profile and device optimization.

With respect to impurity solubility advanced annealing techniques such as solid-phase-epitaxial-regrowth (SPER), flash, and laser annealing, can place impurity atoms on substitutional sites in the silicon lattice to extremely high concentrations when combined with preamorphization. In this context there is a relationship between the equilibrium distribution coefficient and metastable solubility. The long-established equilibrium distribution coefficient of an impurity, extracted in the liquid to solid phase transformation, can make a prediction of metastable solubility after transformation of amorphous silicon into crystalline silicon during SPER, flash, and laser annealing.

With respect to impurity redistribution the significant effects can be split into 3 categories, namely before, during, and after recrystallization. Before recrystallization impurity diffusion in the amorphous region may occur. Boron is particularly susceptible to this effect, which is very significant for the formation of p-type junctions. During recrystallization many impurities move ahead of the amorphous-crystalline (a/c) interface and relocate closer to the surface. In general redistribution is more likely at high impurity concentrations. For low-temperature SPER there is a direct correlation between the magnitude of this redistribution effect and the impurity metastable solubility. After recrystallization, with SPER, flash, and laser annealing commonly leaving residual damage in the silicon substrate, interstitial-diffusers are especially vulnerable to preferential diffusion toward the surface, where impurity atoms may be trapped, ultimately leading to a more shallow profile.

Keywords

Sidiffusionamorphous
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 912: Symposium C – Doping Engineering for Device Fabrication , 2006 , 0912-C04-01
Copyright
Copyright © Materials Research Society 2006

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