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Impurity Conduction in n-Type 4H-SIC
Published online by Cambridge University Press: 15 February 2011
Abstract
Impurity conduction (or hopping conduction) has been observed in the more heavily n-type 4H-SiC samples by both temperature dependent resistivity measurements and thermal admittance spectroscopy. The measured activation energies ɛ 3 for hopping were 4–5 meV and 2.3–3.0 meV respectively. No evidence of hopping conduction was seen by either method in the sample where ND-NA < 1018 cm-3. The thermal admittance spectrum of the lightly n-type sample showed the two nitrogen levels at 53 and 100 meV.
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