Skip to main content Accessibility help

Improved Optical Quality of BAlGaN/AlN MQW Structure Grown on 6H-SiC Substrate by Controlling Residual Strain Using Multi-Buffer Layer

  • Takayoshi Takano (a1), Hideo Kawanishi (a1), Makoto Kurimoto (a1), Yoshiyuki Ishihara (a1), Masato Horie (a1) and Jun Yamamoto (a1)...


BAlGaN and (BAlGaN/AlN) multi-quantum-wells (MQWs) structure were grown on 6H-SiC substrate by a low-pressure metalorganic vapor phase epitaxy (LP-MOVPE). Estimated boron compositions of the BAlGaN quantum wells by an Auger electron spectroscopy (AES) analysis were 0% to 13%. Photoluminescence (PL) spectra around 260 nm were observed at room temperature. The full-width at half maximum (FWHM) of PL spectra for BAlGaN/AlN MQW structure(with 2% of boron) was narrowed from 360 meV to 179 meV, as the residual strain in the BAlGaN well layer was decreased from 1.3% to 1.0% by increasing the Al content in the quantum wells.



Hide All
1. Haruyama, M., Shirai, T., Kawanishi, H. and Suematsu, Y., Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes, pp. 106109 (1996).
2. Tsubamoto, M., Honda, T., Yamamoto, J., Kurimoto, M., Shibata, M., Haruyama, M. and Kawanishi, H., Proceedings of the Second International Conference on Nitride Semiconductors, pp.250251 (1997).
3. Vezin, V., Yatagai, S., Shiraki, H. and Uda, S.: Jpn. J.Appl, Phys. 36, L1437 (1997).
4. Polyakov, A. Y., Shin, M., Skowronski, M., Greve, D. W., Wilson, R. G., Govorkov, A.V. and Desrosers, R. M., Journal of Electronic Materials 26, 237 (1997).
5. Wei, C. H., Xie, Z. Y., Edgar, J. H., Zeng, K. C., Lin, J. Y., Jiang, H. X., Ignatiev, C., Chaudhuri, J. and Braski, D. N., MRS Internet J. Nitride Semicond Res. 4S1, G3.79 (1999).
6. Takano, T., Kurimoto, M., Yamamoto, J., Shibata, M., Ishihara, Y., Tsubamoto, M., Honda, T. and Kawanishi, H., Proceedings of the Third International Symposium on Blue Laser and Light Emitting Diodes, pp.231234 (2000).
7. Honda, T., Shibata, M., Kurimoto, M., Tsubamoto, M., Yamamoto, J. and Kawanishi, H., Jpn. J. Appl. Phys. 39, 2389 (2000).
8. Shin, M., Polyakov, A. Y., Qian, W., Skowronski, M., Greve, D. W. and Wilson, R. G., Mat. Res. Soc. Symp. Proc. 449, 141 (1997).
9. Ishihara, Y., Yamamoto, J., Kurimoto, M., Takano, T. and Kawanishi, H., Jpn. J. Appl. Phys. 38, L1296 (1999).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed