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Impact of TiN/HfO2 Integration on Carrier Mobility

  • Mikael Casse (a1), Laurent Thevenod (a2), Bernard Guillaumot (a3), Lucie Tosti (a1), Vincent Cosnier (a1), Jerome Mitard (a3), Gilles Reimbold (a1), Thierry Billon (a1), Mireille Mouis (a4) and Fabien Boulanger (a1)...

Abstract

We have investigated the impact of a metal gate (TiN) and high-k dielectric (HfO2) on the carrier mobility. We have shown that strong remote Coulomb scattering (RCS) due to charges in the HfO2 layer (either grown by ALD or MOCVD) mostly degrades the mobility at low/medium field. High amount of charges (>1013cm-2) is needed to explain the 30% degradation observed in devices with a thin interface layer. These additional coulombic interactions are effective for bottom oxide up to 2nm. We have developed a RCS model to fully explain the experimental data. The influence of the metal gate is also evidenced. The latter has a significative impact on the Si/SiO2 interface roughness, and may induce some additional coulombic interactions.

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References

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1 Reimbold, G. et al., in Proc. of ECS symp., vol. 2005–01, pp. 437455 (2005).
2 Chau, R. et al., IEEE Elec. Dev. Lett. 25, 408 (2004).
3 Fischetti, M. et al., J. Appl. Phys. 90, pp. 45874608 (2001).
4 Saito, S. et al., IEDM Tech. Dig., pp. 33.3.1–4. (2003).
5 Weber, O. et al., IEDM Tech. Dig., pp. 867870 (2004).
6 Leroux, C. et al., IEDM Tech. Dig., pp. 737740 (2004)
7 Thevenod, L. et al., in Proc. INFOS, Micro. Eng. 80, 11 (2005).
8 Cassé, M. et al., IEEE Trans. Elec. Dev 53, 759 (2006).
9 Villa, S. et al., IEEE Trans. Elec. Dev. 45, pp. 110115 (1998).
10 Esseni, D. et al., IEEE Trans. Elec. Dev. 50, pp. 16651674 (2003).
11 Weber, O. et al., in Proc. ESSDERC, pp. 379382 (2005).

Keywords

Impact of TiN/HfO2 Integration on Carrier Mobility

  • Mikael Casse (a1), Laurent Thevenod (a2), Bernard Guillaumot (a3), Lucie Tosti (a1), Vincent Cosnier (a1), Jerome Mitard (a3), Gilles Reimbold (a1), Thierry Billon (a1), Mireille Mouis (a4) and Fabien Boulanger (a1)...

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