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Hydrostatic and Biaxial Strain in BaxSr1-xTiO3 Films Grown by Pulsed Laser Deposition

  • C. M. Carlson (a1), P. A. Parilla (a2), T. V. Rivkin (a2), J. D. Perkins (a2) and D. S. Ginley (a2)...


We grew BaxSr1−xTiO3 (BST) films on MgO single crystal substrates by pulsed laser deposition (PLD). We report the in-plane (a) and out-of-plane (c) lattice parameters of BST films deposited in a range of O2 deposition pressures [P(02)], as measured by asymmetric rocking curve diffraction. As P(O2) increases, the films' biaxial strain changes from compression (a < c), to cubic (a = c), and then to tension (a > c). Furthermore, both a and c are larger than the lattice constant for bulk BST of the same composition. This indicates the presence of a hydrostatic strain component in addition to the biaxial component. From the measured lattice parameters, we calculate the total residual strain in terms of biaxial and hydrostatic components. We also examine the effects of a post-deposition anneal. Characterizing residual strain and understanding its origin(s) are important since strain affects the dielectric properties of BST films and thereby the properties of devices which incorporate them.



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1 Carlson, C. M., Rivkin, T. V., Parilla, P. A., Perkins, J. D., Ginley, D. S., Kozyrev, A. B., Oshadchy, V. N. and Pavlov, A. S., Appl. Phys. Lett. 76, p. 1920 (2000).
2 Carlson, C. M., Rivkin, T. V., Parilla, P. A., Perkins, J. D., Ginley, D. S., Kozyrev, A. B., Oshadchy, V. N., Pavlov, A. S., Golovkov, A., Sugak, M., Kalinikos, D., Sengupta, L. C., Chiu, L., Zhang, X., Zhu, Y. and Sengupta, S., to appear in Materials Issues for Tunable RF and Microwave Electronics, edited by Jia, Q., Miranda, F. A., Oates, D. E., and Xi, X. X. (Mater. Res. Soc. Symp. Proc., Pittsburgh, PA 2000).
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6 Carlson, C. M., Parilla, P. A., Rivkin, T. V., Perkins, J. D. and Ginley, D. S., Submitted to Appl. Phys. Lett. (2000).
7 Kim, W. J., Chang, W., Qadri, S. B., Pond, J. M., Kirchoefer, S. W., Chrisey, D. B. and Horwitz, J. S., Appl. Phys. Lett. 76, p. 1185 (2000).


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