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Hydrogenated Amorphous Carbon(a-C:H), An Overview.

Published online by Cambridge University Press:  28 February 2011

Bernard S. Meyerson
Bernard S. Meyerson*
Affiliation:
IBM T.J.Watson Research Center, P.O.Box 218, Yorktown Heights, N.Y.10598.
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Abstract

Over the past several years, numerous new materials have been prepared by the glow discharge decomposition of gaseous species.Among these, a material with extraordinary though as yet unfulfilled potential is hydrogenated amorphous carbon(a-C:H).As a metastable state between the two naturally occurring carbons, graphite and diamond, a-C:H can display a wide range of phyical characteristics.Film optical and electronic properties are a strong function of deposition parameters, where 2.l>Eopt >0.9eV.and 1016 >ρ>106Ω-cm., for films deposited between 75 and 375C.Occasionally referred to as “diamond-like”, such films can be extraordinarily hard and virtually impervious to chemical attack.The interrelation of film structure on the atomic level and macroscopic film properties will be discussed, with emphasis on the current controversy over whether such material is indeed diamond-like in its microscopic ordering.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 68: Symposium C – Plasma Processing , 1986 , 191
Copyright
Copyright © Materials Research Society 1986

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References

1) Grigorvici, R., Devenyi, A., Gheroghiu, A., and Belu, A., J.Non-Crystalline Solids 8–10, 793(1972).CrossRefGoogle Scholar
2) Rouzaud, J.N., Oberlin, A., and Beny-Bassez, C., J.Thin Sol.Films 105, 75(1983).Google Scholar
3) Aisenberg, S. and Chabot, R., J.Applied Physics 42, 2953(1971).CrossRefGoogle Scholar
4) Craig, S. and Harding, G.L., Thin Sol.Films 97, 345(1982).CrossRefGoogle Scholar
5) Meyerson, B.S. and Smith, F.W., J.Non-Crystalline Solids 35–36, 435(1980).Google Scholar
6) Dischler, B., Bubenzer, A., and Koidl, P., Sol.State Comm. 48 105(1983).Google Scholar
7) Meyerson, B.S. and Smith, F.W., Sol.State Comm. 34, 531(1980).Google Scholar
8) Meyerson, B.S. and Smith, F.W., Sol.State Comm. 41, 23(1982).CrossRefGoogle Scholar
9) Optical gaps were determined from a Tauc plot of absorbtion data, using the expression (αE)1/2=B(E-Eopt), and extrapolating to α=0.Google Scholar
10) Jarman, R.H. and Ray, G.J., J.Chem.Soc., Chem.Comm., 1153(1985).Google Scholar
11) Kaplan, S., Jansen, F., and Machonkin, M., Appl.Phys.Let. 47, 750(1985).CrossRefGoogle Scholar
12) Miyasato, T., Kawakami, Y., Kawano, T., and Hiraki, A., Jap.J.Appl.Phys. 23, L234(1984).Google Scholar
13) Dillon, R.O., Woollam, J. A, and Katkanant, V., Phys.Rev.B 29, 3482(1984).Google Scholar