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Hydrogen Plasma Treatment of Natural and Homoepitaxial Diamond

Published online by Cambridge University Press:  10 February 2011

R. E. Rawles ,
R. Gat ,
W. G. Morris  and
M. P. D'Evelyn
R. E. Rawles
Affiliation:
Rice University, Department of Chemistry, Houston, TX, 77251-1892
R. Gat
Affiliation:
Applied Science and Technology, Inc., Woburn, MA
W. G. Morris
Affiliation:
General Electric Corporate Research & Development, P.O. Box 8, Schenectady, NY12301
M. P. D'Evelyn
Affiliation:
General Electric Corporate Research & Development, P.O. Box 8, Schenectady, NY12301 Rensselaer Polytechnic Institute, Department of Materials Science & Engineering, Troy, NY 12180-3590
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Abstract

As-polished and homoepitaxial diamond (100)- and (111)-oriented single crystals, natural diamond powders of 0.12-6 μm diameter, and high-pressure/hightemperature (HPHT) diamond powders of 50-100 μm diameter were treated in a microwave hydrogen plasma under four sets of conditions. Negligible changes in the weights (±10 μg) of the as-polished and homoepitaxial diamonds were observed.Post-treatment atomic force microscopy (AFM) showed a combination of smoothing and pit formation on (100) surfaces, the details of which were sensitive to the structure of the starting surface. Asymmetric pits formed on an as-polished (111) surface, but no qualitative changes in the structure of highly defective (100) and (111) films were observed. Natural diamond powders, which were quite irregular and rough prior to treatment, became markedly smoother and well-faceted, as observed by scanning electron microscopy (SEM). The degree of faceting was sensitive to plasma power level but was independent of H2 flow rate. The size and degree of faceting appeared to be the same after plasma treatment for isolated and closelypacked particles; however, the latter fused into a quasi-continuous film. “Regrown” crystallites were observed on the surfaces of synthetic type Ib diamond particles following plasma treatment. We argue that surface diffusion is the dominant mechanism for the observed morphological changes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 416: Symposium DD – Diamond for Electronic Applications , 1995 , 299
Copyright
Copyright © Materials Research Society 1996

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References

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