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Hydrogen Migration in Single Crystalline ZnO

  • Klaus Magnus Håland Johansen (a1), Jens Sherman Christensen (a2), Edouard V. Monakhov (a3), Andrej Yu. Kuznetsov (a4) and Bengt Gunnar Svensson (a5)...

Abstract

Hydrogen has been proposed as one of the contributors to the native n-type doping in as-grown Zinc Oxide and can also be used as an active (intentional) n-type dopant. In this work we have employed Secondary Ion Mass Spectrometry (SIMS) to study deuterium diffusion profiles in single crystalline ZnO. The samples used are hydrothermally grown, high-resistive (10 kΩ cm) monocrystalline ZnO implanted with deuterium to a dose of 1×1015 cm−2 yielding a peak concentration of approximately 5 × 1018 cm−3 at a depth of 2.2 µm. Diffusion profiles have been studied after 30 minutes isochronal heat treatments from 100ºC up to 400ºC in steps of 50ºC. The observed redistribution can be explained by employing a diffusion model which includes trapping of 2H by Li-impurities and an activation energy of 0.85 eV is extracted for the diffusion of 2H.

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1. Nickel, N. H. and Brendel, K., Phys. Rev. B 68, 193303 (2003).
2. Hofmann, D. M., Hofstaetter, A., Leiter, F., Zhou, H., Henecker, F., Meyer, B. K., Orlinskii, S. B., Schmidt, J., and Baranov, P. G., Phys. Rev. Lett. 88, 045504 (2002).
3. Thomas, D. G. and Lander, J. J., The Journal of Chemical Physics 25, 1136 (1956).
4. Ip, K., Overberg, M. E., Heo, Y. W., Norton, D. P., Pearton, S. J., Stutz, C. E., Luo, B., Ren, F., Look, D. C., and Zavada, J. M., Applied Physics Letters 82, 385 (2003).10.1063/1.1539927
5. Nickel, N. H., Physical Review B (Condensed Matter and Materials Physics) 73, 195204 (pages 9) (2006).
6. Theys, B., Sallet, V., Jomard, F., Lusson, A., Rommeluere, J.-F., and Teukam, Z., Journal of Applied Physics 91, 3922 (2002).
7. Wardle, M. G., Goss, J. P., and Briddon, P. R., Physical Review Letters 96, 205504 (2006).
8. Campbell, S. A., The science and enginering of microelectronic fabrication (Oxford University Press, 2001), page 45.
9. Monakhov, E. V., Svensson, B. G., Linnarsson, M. K., Magna, A. L., Spinella, C., Bongiorno, C., Privitera, V., Fortunato, G., and Mariucci, L., Applied Physics Letters 86, 151902 (pages 3) (2005).10.1063/1.1899765
10. Monakhov, E. V., Christensen, J. S., Maknys, K., Svensson, B. G., and Kuznetsov, A. Y., Applied Physics Letters 87, 191910 (pages 3) (2005)10.1063/1.2128059
11. Ip, K., Overberg, M. E., Heo, Y. W., Norton, D. P., Pearton, S. J., Kucheyev, S. O., Jagadish, C., Williams, J. S., Wilson, R. G., and Zavada, J. M., Applied Physics Letters 81, 3996 (2002).10.1063/1.1524033
12. Borrnert, F., Lavrov, E. V., and Weber, J., Physical Review B (Condensed Matter and Materials Physics) 75, 205202 (pages 5) (2007).
13. Li, X., Keyes, B., Asher, S., Zhang, S. B., Wei, S.-H., Coutts, T. J., Limpijumnong, S., and Walle, C. G. V. de, Applied Physics Letters 86, 122107 (pages 3) (2005).10.1063/1.1886256
14. Wardle, M. G., Goss, J. P., and Briddon, P. R., Physical Review B (Condensed Matter and Materials Physics) 71, 155205 (pages 10) (2005).10.1103/PhysRevB.71.155205
15. Shi, G. A., Stavola, M., and Fowler, W. B., Physical Review B (Condensed Matter and Materials Physics) 73, 081201 (pages 3) (2006).
16. Janson, M. S., Hallén, A., Linnarsson, M. K., and Svensson, B. G., Phys. Rev. B 64, 195202 (2001).10.1103/PhysRevB.64.195202
17. Look, D. C., Reynolds, D. C., Sizelove, J. R., Jones, R. L., Litton, C. W., Cantwell, G., and Harsch, W. C., Solid State Communications 105, 399 (1998).

Keywords

Hydrogen Migration in Single Crystalline ZnO

  • Klaus Magnus Håland Johansen (a1), Jens Sherman Christensen (a2), Edouard V. Monakhov (a3), Andrej Yu. Kuznetsov (a4) and Bengt Gunnar Svensson (a5)...

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