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High-Rate Rpecvd of a-Si:H Films by Means of a VHF Resonant Plasma Source

  • T. Blum (a1), G. Suchaneck (a1), J. Kuske (a1), U. Stephan (a1), W. Beyer (a2) and A. Kottwitz (a1)...

Abstract

High deposition rate (up to 5 nm/s) a-Si:H films suitable for recrystallization were deposited using a λ/4 helical resonator source. Refractive index, Tauc-gap, photo- and dark conductivities were measured for film characterization. The metastable behaviour was characterized by the light- induced degradation of the photoconductivity. Hydrogen content and bonding configuration were analyzed by IR absorption and mass separated thermal effusion transients, film microstructure was studied by intentionally incorporating carbon and oxygen. Most of the hydrogen is located on internal surfaces in the otherwise dense material. Differences between the deposition from our highly excited plasma and the conventional remote PECVD process are discussed.

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[1] Eaglesham, D. J., J. Appl. Phys. 77 (1995) 3597
[2] Stephan, U., Kuske, J., Schade, K., MRS Symp. Proc. 336, Amorphous Silicon Technology, p.79, San Francisco, 1994
[3] Laudahn, H. 1994 (unpublished)
[4] Suchaneck, G., Albert, M., Beyer, W., Stötzel, H. and Schade, K., J. Non-Cryst. Solids 137&138 (1991) 701
[5] Suchaneck, G., Steinke, O., Alhallani, B. and Schade, K., J. Non-Cryst. Solids 187 (1995)
[6] Langford, A. A., Fleet, M. L., Nelson, B. P., Lanford, W. A., Maley, N., Phys. Rev. B, Vol.45 (23), 1992
[7] Beyer, W., Herion, J., Wagner, H. and Zastrow, U., Philos. Mag. B 63 (1991) 269
[8] Bennoit-Cattin, P. and Bernhard, L., J. Appl. Phys. 39 (1968) 5732
[9] Wild, C. and Koidl, P., J. Appl. Phys. 69 (1991) 2909
[10] Hoekstra, R. J. and Kushner, M. J., J. Appl. Phys. 79 (1995) 2275
[11] Mahan, A. H., Carapella, J., Nelson, B. P., Crandall, R. S. and Balberg, I., J. Appl. Phys. 69(1991)6728
[12] Lucovsky, G., Parsons, G. N., Wang, C., Davidson, B. N. and Tsu, D. V., Solar Cells 27 (1989) 121
[13] Ouwens, J. D. and Schropp, R. E. I., Amorphous Silicon Technology-1995/MRS Symp. Proc. Vol.377 (1995) 419
[14] Grill, A. and Patel, V., Appl. Phys. Lett. 60 (1992) 2089
[15] Jacob, W. and Unger, M., Appl. Phys. Lett. 68 (1996) 475
[16] Beyer, W. and Wagner, H., J. Non-Cryst. Solids 59–60 (1983) 161
[17] Stutzmann, M., Jackson, W. B. and Tsai, C. C., Phys. Rev. B32 (1985) 23
[18] Nomura, H., Kono, A. and Goto, T., Jpn. J. Appl, Phys., vol.33 (1994) 4165
[19] Kono, A., Koike, N., Nomura, H. and Goto, T., Jpn. J. Appl. Phys., vol.34 (1995) 307

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High-Rate Rpecvd of a-Si:H Films by Means of a VHF Resonant Plasma Source

  • T. Blum (a1), G. Suchaneck (a1), J. Kuske (a1), U. Stephan (a1), W. Beyer (a2) and A. Kottwitz (a1)...

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